一种作为多功能和超宽可调机械器件的混合石墨烯-氮化硅纳米膜
A hybrid graphene-siliconnitride nanomembrane as a versatile and ultra-widely tunable mechanical device
AI总结：
本文提出一种由混合石墨烯/氮化硅膜和金属引线组成的片上石墨烯集成NEMS器件，通过施加静态和交流电压实现了超宽频率调谐、后屈曲转变及非线性振动激发，兼具机械鲁棒性与高可控性。
摘要：
将2D材料集成到纳米机电系统（NEMS）中，结合了硅基材料的鲁棒性与2D材料卓越的电学可控性，大幅提升了系统性能，这已成为纳米技术中许多先进应用的关键。在此，我们通过实验演示并理论分析了一种强大的片上石墨烯集成NEMS器件，该器件由混合石墨烯/氮化硅膜和金属引线组成，能够实现极大的静态和动态参数调节。当向引线施加静态电压时，由引线与膜之间的热膨胀差异引起的力会导致超宽频率调谐、变形（后屈曲转变）以及机械性能的调节。此外，通过向引线注入交流电压，我们可以在没有复杂且占用空间的驱动系统的情况下，激发谐振器振动，甚至远远超出其线性区域。我们的结果表明，该器件是一个紧凑的集成系统，具有机械鲁棒性、高可控性和快速响应。它不仅扩展了NEMS器件应用范围的极限，还推动了多维纳米机械谐振器进入非线性区域工作。
英文摘要：
Integration of 2D materials in nanoelectromechanical systems (NEMS) marries the robustness of silicon-based materials with exceptional electrical controllability in 2D materials, drastically enhancing system performance which now is the key for many advanced applications in nanotechnology. Here, we experimentally demonstrate and theoretically analyze a powerful on-chip graphene integrated NEMS device consisting of a hybrid graphene/silicon-nitride membrane with metallic leads that enables an extremely large static and dynamic parameter regulation. When a static voltage is applied to the leads, the force induced by the thermal expansion difference between the leads and the membrane results in ultra-wide frequency tuning, deformation (post-buckling transition) and regulation of mechanical properties. Moreover, by injecting an alternating voltage to the leads, we can excite the resonator vibrating even far beyond its linear regime without a complex and space consuming actuation system. Our results prove that the device is a compact integrated system possessing mechanical robustness, high controllability, and fast response. It not only expands the limit of the application range of NEMS devices but also pushes multidimensional nanomechanical resonators into working in the nonlinear regime.
机构、总结、中文摘要均由AI分析而来，可能存在错误，请以论文正文为准。
