光刻定义的零间隙应变传感器
Lithographically Defined Zerogap Strain Sensors
AI总结：
本文提出光刻定义的零间隙应变传感器，通过消除传统裂纹传感器的随机性和剧烈撕裂，在18%应变下实现超过15000的应变系数，为宽范围高灵敏应变传感提供新方案。
摘要：
软聚合物上的金属薄膜为基于电阻的应变传感器提供了独特的机会。导电薄膜与柔性基底之间的力学失配会导致裂纹张开和闭合，从而使电阻随应变发生变化。然而，相邻裂纹在形成、形状、长度、取向和间距上的高度随机性限制了传感范围和可重复性。本文中，我们提出一项突破：零间隙应变传感器，其中光刻技术消除了传统裂纹传感器固有的随机性和剧烈撕裂过程，并允许间隙之间具有短周期性以及柔和的侧壁接触，这对于高应变传感至关重要，使其能够在前所未有的宽范围内工作。我们的传感器在εext=18%时实现了超过15,000的应变系数，这是目前已知的最高值。通过具有周期性和应变特征的三千至一万纳米宽度的均匀间隙，该方法对未来应变传感器具有深远影响，其传感范围仅受柔性基底范围的限制，并且始终以非剧烈方式运行，保持在金属的拉伸极限以下。
英文摘要：
Metal thin films on soft polymers provide a unique opportunity for resistance-based strain sensors. A mechanical mismatch between the conductive film and the flexible substrate causes cracks to open and close, changing the electrical resistance as a function of strain. However, the very randomness of the formation, shape, length, orientation, and distance between adjacent cracks limits the sensing range as well as repeatability. Herein, we present a breakthrough: the Zerogap Strain Sensor, whereby lithography eliminates randomness and violent tearing process inherent in conventional crack sensors and allows for short periodicity between gaps with gentle sidewall contacts, critical in high strain sensing enabling operation over an unprecedently wide range. Our sensor achieves a gauge factor of over 15,000 at εext=18%, the highest known value. With the uniform gaps of three-to-ten thousand nanometer widths characterized by periodicity and strain, this approach has far reaching implications for future strain sensors whose range is limited only by that of the flexible substrate, with non-violent operations that always remain below the tensile limit of the metal.
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