面向6G厘米波段的薄膜铌酸锂绝缘体上表面声波器件
Thin-film Lithium Niobate on Insulator Surface Acoustic Wave Devices for 6G Centimeter Bands
AI总结：
本研究将基于LNOI的SH-SAW谐振器频率扩展至6G厘米波段，通过制备波长240-400 nm的器件实现9.05-13.37 GHz频率，优化后器件性能指标优异。
摘要：
在本研究中，我们探讨了将基于绝缘体上铌酸锂（LNOI）衬底的剪切水平（S.H.）表面声波（SAW）谐振器频率扩展至6G无线系统厘米波段的方法。我们制备了波长在240 nm至400 nm之间的原型谐振器，实验结果表明频率成功扩展至9.05至13.37 GHz之间。然而，随着谐振频率（fs）的升高，可以观察到性能出现明显下降。预计这种效应是由较小λ器件的非理想h/elec/λ引起的。优化后的LNOI SH-SAW（λ为400 nm）具有9.05 GHz的fs、15%的keff²、213的Qmax和32的FoM，表明该器件成功实现了厘米波段的应用。
英文摘要：
In this work, we investigate the frequency scaling of shear-horizontal (S.H.) surface acoustic wave (SAW) resonators based on a lithium niobate on insulator (LNOI) substrate into the centimeter bands for 6G wireless systems. Prototyped resonators with wavelengths ranging between 240 nm and 400 nm were fabricated, and the experimental results exhibit a successful frequency scaling between 9.05 and 13.37 GHz. However, a noticeable performance degradation can be observed as the resonance frequency (fs) scales. Such an effect is expected to be caused by non-ideal helec/λ for smaller λ devices. The optimized LNOI SH-SAW with a λ of 400 nm exhibits a fs of 9.05 GHz, a keff2 of 15%, Qmax of 213 and a FoM of 32, which indicates a successful implementation for device targeting centimeter bands.
机构、总结、中文摘要均由AI分析而来，可能存在错误，请以论文正文为准。
