基于简单谐振电路的新型电容-相位传感器
A Novel Capacitance-to-Phase Transducer Based on a Simple Resonant Circuit
AI总结：
本文提出一种基于改进全通滤波器与串联谐振回路的新型电容-相位传感器，实现高分辨率电容测量，并可用于位移与电场传感，适应MEMS小电容场景。
摘要：
本文描述了一种新型室温电容-相位传感器，该传感器采用改进的全通滤波器架构，并结合了一个具有中等品质因数的简单串联谐振回路。它由一个耗散较小的分立电感器与作为传感器的接地电容器谐振构成，以获得在1 Hz带宽内等于或优于10-11的相对分辨率。该传感器将电容变化转换为谐振频率下载波信号相位的变化，并被配置为近似理想全通滤波器的结构。这消除了当载波信号未完全调谐到谐振时幅度调制的影响。当用作机械位移-相位传感器时，预测的位置噪声约为3飞米/根赫兹。该电路的其他应用包括电场测量，其中传感电容取决于施加的电场。此外，该电路可以很容易地适应非常小的电容值（1-2皮法），这在基于MEMS的传感器中很常见。
英文摘要：
A novel room temperature capacitance-to-phase transducer is described, which uses a modified All-Pass filter architecture combined with a simple series resonant tank circuit with a moderate Q-factor. It is fashioned from a discrete inductor with small dissipation resonating with a grounded capacitor acting as the sensor, to obtain a relative resolution equal to or better than 10-11 in a 1 Hz bandwidth. The transducer converts the change in capacitance to the change in the phase of a carrier signal at the resonance frequency and is configured to act as a close approximation of the almost ideal All-Pass filter. This cancels out the effects of amplitude modulation when the carrier signal is imperfectly tuned to the resonance. When used as a mechanical displacement-to-phase transducer, the predicted position noise was approximately 3 femtometre/rootHz. Other applications of the proposed circuit include the measurement of the electric field, where the sensing capacitor depends on the applied electric field. In addition, the circuit can be easily adapted to function with very small capacitance values (1 - 2 pF) as is typical in MEMS-based transducers.
机构、总结、中文摘要均由AI分析而来，可能存在错误，请以论文正文为准。
