arXivDaily arXiv每日学术速递 周一至周五更新
arXiv 2307.14799cs.AIcs.LO
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基于ASP的半导体制造过程混合多目标调度(扩展版)

Hybrid ASP-based multi-objective scheduling of semiconductor manufacturing processes (Extended version)

University of Klagenfurt(克拉根福大学);Cairo University(开罗大学);Graz University of Technology(格拉茨技术大学)

Mohammed M. S. El-Kholany, Ramsha Ali, Martin Gebser

AI总结:

本文针对现实半导体制造过程的调度问题,采用带差异逻辑的混合 Answer Set Programming 进行建模,纳入灵活的机器处理、设置、批量和维护操作,研究多优化目标下的大规模调度潜力。

摘要:

现代半导体制造包含数百道操作的复杂生产过程,从批次发放到完成可能需要数月。这些高科技机器种类繁多,在多个阶段对单个晶圆、批次或大批次进行操作,并需要针对特定产品的设置和专门的维护程序。这种情况不同于传统作业车间调度场景,后者的生产过程和机器较不复杂,主要关注解决高度组合但抽象的调度问题。在本工作中,我们通过使用带差异逻辑的混合 Answer Set Programming 对特定需求进行建模,来解决现实半导体制造过程的调度问题,纳入了灵活的机器处理、设置、批量和维护操作。与现有方法使用贪婪启发式局部调度或独立优化特定机器组分配不同,我们研究了受多个优化目标约束的大规模调度潜力。

英文摘要:

Modern semiconductor manufacturing involves intricate production processes consisting of hundreds of operations, which can take several months from lot release to completion. The high-tech machines used in these processes are diverse, operate on individual wafers, lots, or batches in multiple stages, and necessitate product-specific setups and specialized maintenance procedures. This situation is different from traditional job-shop scheduling scenarios, which have less complex production processes and machines, and mainly focus on solving highly combinatorial but abstract scheduling problems. In this work, we address the scheduling of realistic semiconductor manufacturing processes by modeling their specific requirements using hybrid Answer Set Programming with difference logic, incorporating flexible machine processing, setup, batching and maintenance operations. Unlike existing methods that schedule semiconductor manufacturing processes locally with greedy heuristics or by independently optimizing specific machine group allocations, we examine the potentials of large-scale scheduling subject to multiple optimization objectives.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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