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arXiv 2307.03358physics.app-ph
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具有铝电极的铌酸锂-铌酸锂谐振器

Niobate-on-Niobate Resonators with Aluminum Electrodes

Yiyang Feng, Sen Dai, Sunil A. Bhave

AI总结:

本文提出基于LN-on-LN平台和铝叉指换能器的悬浮横向振动谐振器,实现Q值最高2600、耦合系数13.9%及FOM达294,并展示稳定的TCF和功率处理能力,为非制冷传感器阵列提供新方案。

摘要:

在这项工作中,我们成功设计并测试了基于铌酸锂薄膜-铌酸锂载片晶圆(LN-on-LN)平台的悬浮横向振动谐振器(LVR),该谐振器由铝叉指换能器(IDT)驱动。与铌酸锂-硅系统不同,LN-on-LN平台提供了应力中性的铌酸锂薄膜,展现出体块单晶的质量。这些由铝IDT驱动的LN-on-LN谐振器是利用先进的气相HF释放技术制备的。我们的测试揭示了LVR谐振器中同时存在对称(S0)和水平剪切(SH0)横向振动模式。谐振器表现出500至2600之间的品质因数(Q),以及高达13.9%的耦合系数$k_{eff}^2$。品质因数(FOM)$k_{eff}^2 \ imes Q$最高可达294。这些器件的成品率被证明非常可靠。值得注意的是,我们的LN-on-LN器件表现出持续稳定的频率温度系数(TCF)和良好的功率处理能力。鉴于铌酸锂的低热导率,我们的LN-on-LN技术为未来应用(如使用单片集成谐振器阵列的高灵敏度非制冷传感器)展现出巨大潜力。

英文摘要:

In this work, we have successfully engineered and examined suspended laterally vibrating resonators (LVRs) on a lithium niobate thin film on lithium niobate carrier wafer (LN-on-LN) platform, powered by aluminum interdigital transducers (IDTs). Unlike the lithium niobate-on-silicon system, the LN-on-LN platform delivers a stress-neutral lithium niobate thin film exhibiting the quality of bulk single crystal. The creation of these aluminum-IDTs-driven LN-on-LN resonators was achieved utilizing cutting-edge vapor-HF release techniques. Our testing revealed both symmetric (S0) and sheer horizontal (SH0) lateral vibrations in the LVR resonators. The resonators displayed a quality factor (Q) ranging between 500 and 2600, and coupling coefficient $k_{eff}^2$ up to 13.9%. The figure of merit (FOM) $k_{eff}^2 \times Q$ can reach as high as 294. The yield of these devices proved to be impressively reliable. Remarkably, our LN-on-LN devices demonstrated a consistently stable temperature coefficient of frequency (TCF) and good power handling. Given the low thermal conductivity of lithium niobate, our LN-on-LN technology presents promising potential for future applications such as highly sensitive uncooled sensors using monolithic chip integrated resonator arrays.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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