在厚SOI平台上具有无约束分束比的锥形MMI分束器
Tapered MMI splitters with unconstrained splitting ratio on a thick SOI platform
摘要：
本文系统地研究了由多个锥形截面构成的多模干涉分束器。我们的目标是为我们基于3 $μ$ m厚波导的硅光子学平台创建一个涵盖所有分光比（SR）的鲁棒低损耗分光器库。起始点总是非锥形正则MMI，其具有一般对称性（正则SR 50：50、100：0和倒数比）、镜像对称限制对称性（正则SR 85：15、50：50、100：0和倒数比）和点对称限制对称性（正则SR 72：28和28：72）。这三种类型的分束器然后被分成一至四个等长的子部分，导致12种可能的不同配置。在这些子部分中的每一个中，宽度首先向上或向下线性地逐渐变细，然后逐渐变细回到其起始值，从而确保镜像对称。对于所有12种构型，我们进行了广泛的数值模拟。对于每个给定的宽度变化，我们扫描了分束器的长度，并计算了输出端基模的功率及其相对相位。然后，我们选择了具有足够低的损耗的设计，并将其SR映射为宽度变化或长度变化的函数，从而为具有任何SR的MMI分束器的设计创建系统映射。最终，我们选择并制造了SR范围从5：95到95：5的设计子集，并通过光学测量验证了其操作。
英文摘要：
We have systematically studied multimode interferometer (MMI) splitters made from multiple tapered sections. The goal is to create a library of robust and low-loss splitters covering all splitting ratios (SR) for our silicon photonics platform based on 3 $μ$m thick waveguides. The starting point is always a non-tapered canonical MMI either with general symmetry (canonical SRs 50:50, 100:0, and reciprocal ratios), with mirror symmetric restricted symmetry (canonical SRs 85:15, 50:50, 100:0, and reciprocal ratios), and with point-symmetric restricted symmetry (canonical SRs 72:28 and 28:72). Splitters of these three types are then divided into one to four subsections of equal length, leading to 12 possible different configurations. In each of these subsections, the width is first linearly tapered either up or down and then tapered back to its starting value ensuring mirror symmetry. For all twelve configurations, we carried out an extensive campaign of numerical simulations. For each given width change, we scanned the splitter length and calculated the power in the fundamental mode at the output as well as its relative phase. We then selected the designs with sufficiently low loss and mapped their SR as a function of either the change in width change or length, therefore creating systematic maps for the design of MMI splitters with any SR. Eventually, we selected and fabricated a subset of designs with SRs ranging from 5:95 to 95:5 in steps of 5% and validated their operation through optical measurements.
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