铁电栅鳍微波声信号处理器
The Ferroelectric-Gate Fin Microwave Acoustic Signal Processor
摘要：
通过微波频带上的动态频谱分配的无线通信对于适应指数增长的数据流量至关重要，需要大量的射频（RF）滤波器阵列以用于在任意频率处的自适应信号整形。然而，基于平面声谐振器的常规RF滤波器由于其大的占用面积和有限的片上频率可扩展性而不能实现这样的大规模集成阵列。在这里，我们提出了一个信号处理器，使集成的三维铁电栅鳍（FGF）纳米声学谐振器具有极端的频率可剪裁性和大规模的可集成性。FGF通过在硅纳米鳍上生长原子层铁电氧化物-氧化锆换能器来创建，以体声波模式操作，具有超过3-28 GHz的光刻可缩放频率，并提供19.4 x 1010（在~ 11 GHz处）的创纪录的高频-品质因数-机电耦合乘积（f.Q.kt2）。覆盖9-12 GHz的单片滤波器阵列也证明了通过片上的电气耦合的FGFs。该演示突出了FGF谐振器实现可扩展到毫米波频率的芯片级自适应处理器的潜力。
英文摘要：
Wireless communication through dynamic spectrum allocation over microwave bands, essential to accommodate exponentially growing data traffic, requires massive array of radio-frequency (RF) filters for adaptive signal shaping at arbitrary frequencies. However, conventional RF filters based on planar acoustic resonators are incapable to realize such massive integrated arrays, due to their large footprint and limited on-chip frequency scalability. Here, we present a signal processor enabled by integration of three-dimensional ferroelectric-gate fin (FGF) nano-acoustic resonators with extreme frequency tailorability and large-scale integrability. FGFs are created by growing atomic-layered ferroelectric hafnia-zirconia transducers on silicon nano-fins, operate in bulk acoustic modes with lithographically scalable frequency over 3-28 GHz, and provide record high frequency - quality factor - electromechanical coupling product (f.Q.kt2) of 19.4 x 1010 (at ~11GHz). A monolithic filter-array covering 9-12 GHz is also demonstrated by on-chip electrical coupling of FGFs. This demonstration highlights the potential of FGF resonators to realize chip-scale adaptive processors extendable to millimeter-wave frequencies.
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