无引发剂可光交联纤维素基抗蚀剂用于通过直接激光写入制备亚微米图案
Initiator-free photo-crosslinkable cellulose-based resists for fabricating submicron patterns via direct laser writing
AI总结:
本文通过合成含硫醇和烯烃/甲基丙烯酸侧基的双功能二醋酸纤维素衍生物,开发了无需光引发剂即可通过双光子直接激光写入和紫外照射交联的生物基光刻胶,用于制备亚微米图案。
摘要:
合成了新型双功能二醋酸纤维素衍生物,以实现生物基光刻胶,该光刻胶可通过双光子吸收经由直接激光写入(DLW)进行结构化,而无需使用光引发剂。为此,二醋酸纤维素被功能化,引入硫醇基团以及烯烃或甲基丙烯酸侧基,从而能够进行硫醇共轭交联。这些纤维素衍生物还可在不使用引发剂的情况下通过紫外照射(λ = 254 nm 和 365 nm)进行光交联。
英文摘要:
Novel bifunctional cellulose diacetate derivatives were synthesized in order to achieve bio-based photoresists, which can be structured by two-photon absorption via direct laser writing (DLW) without the need to use a photoinitiator. Therefore, cellulose diacetate is functionalized with thiol moieties and olefinic or methacrylic side groups enabling thiol-conjugated crosslinking. These cellulose derivatives are also photo-crosslinkable via UV irradiation ($λ$ = 254 nm and 365 nm) without using an initiator.
机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。