光电导开关上的光图案投影动态控制高压执行器阵列
Dynamic control of high-voltage actuator arrays by light-pattern projection on photoconductive switches
摘要：
迄今为止，控制高压致动器阵列的能力依赖于昂贵的微电子工艺或每个致动器到单个片外高压开关的单独布线。在这里，我们提出了一种替代方法，使用片上光电导开关连同光投影系统单独解决高电压致动器。每个致动器连接到一个或多个开关，除非使用直射光照明打开，否则这些开关名义上是关闭的。我们选择氢化非晶硅作为我们的光电导材料，我们提供完整的表征其光暗电导，击穿场，和光谱响应。由此产生的开关是非常强大的，我们提供其制造工艺的全部细节。我们证明，开关可以集成在不同的架构，以支持交流和直流驱动的执行器，并提供工程指导方针，其功能设计。为了证明我们的方法的多功能性，我们演示了使用的光电导开关在两个截然不同的应用控制微米大小的栅电极图案流场在微流体室，和厘米大小的静电致动器的控制，用于创建机械变形的触觉显示器。
英文摘要：
The ability to control high-voltage actuator arrays relies, to date, on expensive microelectronic processes or on individual wiring of each actuator to a single off-chip high-voltage switch. Here we present an alternative approach that uses on-chip photoconductive switches together with a light projection system to individually address high-voltage actuators. Each actuator is connected to one or more switches that are nominally OFF unless turned ON using direct light illumination. We selected hydrogenated amorphous silicon as our photoconductive material, and we provide complete characterization of its light to dark conductance, breakdown field, and spectral response. The resulting switches are very robust, and we provide full details of their fabrication processes. We demonstrate that the switches can be integrated in different architectures to support both AC and DC-driven actuators and provide engineering guidelines for their functional design. To demonstrate the versatility of our approach, we demonstrate the use of the photoconductive switches in two distinctly different applications control of micrometer-sized gate electrodes for patterning flow fields in a microfluidic chamber, and control of centimeter-sized electrostatic actuators for creating mechanical deformations for haptic displays.
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