利用纳米级聚焦针点实现单量子点筛选与定制化光子器件集成
Single quantum dot selection and tailor-made photonic device integration using nanoscale focus pinspot
AI总结：
针对多数半导体量子点材料体系难以制备低密度单量子点、传统刻蚀降密法破坏介质不利于集成的问题，本研究提出基于氦离子显微镜的纳米级聚焦针点无损筛选法，实现单量子点精准选取与光子器件确定性集成，将量子点发射提取效率提升27倍，且适配多种材料与光子结构。
摘要：
在各类量子光源平台中，外延生长的半导体量子点（quantum dots, QDs）凭借出色的亮度与可扩展性，是实现各类量子光子技术最具吸引力的核心器件之一。这类量子点可基于合适的发射带宽构建多种材料体系，但仅有少数材料体系能成功生长出作为量子光源核心的单颗或低密度量子点。在绝大多数其他材料体系中，实现低密度量子点难度较大，通常需采用台面刻蚀工艺降低其密度。然而，刻蚀工艺会不可逆地破坏量子点附近的介质，不利于平面内器件集成。本研究中，我们采用一种名为纳米级聚焦针点（nanoscale focus pinspot, NFP）的无损发光筛选方法，该方法借助氦离子显微镜，在保留周围介质的前提下降低发光量子点的密度。由于NFP能够以纳米级分辨率精准调控发光特性，我们可在空间与光谱维度均匹配的目标量子点上确定性制备光子器件。施加NFP后，我们从高密度量子点集合的发射信号中仅提取出单颗量子点的发射光。此外，我们将圆形布拉格反射器的光子结构与筛选出的量子点确定性集成，使量子点发射光的提取效率提升了27倍。而且，该技术不会破坏介质，仅调控发光特性，因此可高度适用于包括光波导、光子晶体腔在内的各类光子结构，且不受材料限制。
英文摘要：
Among the diverse platforms of quantum light sources, epitaxially grown semiconductor quantum dots (QDs) are one of the most attractive workhorses for realizing various quantum photonic technologies owing to their outstanding brightness and scalability. There exist various material systems for these QDs based on their appropriate emission bandwidth; however, only a few material systems have successfully grown single or low-density QDs, which are essential for quantum light sources. In most other material systems, it is difficult to realize low-density QDs, and the mesa-etching process is usually undergone in order to reduce their density. Nevertheless, the etching process irreversibly destroys the medium near the QD, which is detrimental to in-plane device integration. In this study, we apply a nondestructive luminescence picking method termed as nanoscale focus pinspot (NFP) using helium ion microscopy to reduce the luminous QD density while retaining the surrounding medium. Given that the NFP can precisely manipulate the luminescence at nanoscale resolution, a photonic device can be deterministically fabricated on the target QD matched from both spatial and spectral points of view. After applying the NFP, we extract only a single QD emission out of the high-density ensemble QD emission. Moreover, the photonic structure of a circular Bragg reflector is deterministically integrated with the selected QD, and the extraction efficiency of the QD emission has been improved 27 times. Furthermore, this technique does not destroy the medium and only controls the luminescence. Hence, it is highly applicable to various photonic structures, including photonic waveguides or photonic crystal cavities regardless of their materials.
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