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arXiv 2205.07697physics.app-ph
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可编程相位板能否在透射电子显微镜(TEM)中充当像差校正器?

Can a Programmable Phase Plate Serve as an Aberration Corrector in the Transmission Electron Microscope (TEM)?

Francisco Vega Ibáñez, Armand Béché, Johan Verbeeck

AI总结:

本文通过数值模拟评估可编程静电相位板的多种设计,证明其可在常规未校正TEM中将球差校正至1 Å以下,探针d₅₀最小达0.66 Å。

摘要:

可编程静电相位板的最新进展引发了关于其在特定应用中实用性的问题。在此,我们探索此类相位板的不同设计,其具体目标是校正透射电子显微镜(TEM)中的球差。我们通过数值研究考察相位板能否在常规未校正TEM上提供低至1 Ångström的空间分辨率。研究评估了不同设计方面(填充因子、像素图案、对称性),以理解它们对电子探针尺寸和电流密度的影响。一些提出的设计显示探针尺寸(d₅₀)低至0.66 Å,证明使用由静电相移元件阵列组成的可编程相位板,将球差校正到远超1 Å极限应当是可能的。

英文摘要:

Current progress in programmable electrostatic phase plates raises questions about their usefulness for specific applications. Here, we explore different designs for such phase plates with the specific goal of correcting spherical aberration in the Transmission Electron Microscope (TEM). We numerically investigate whether a phase plate could provide down to 1 $Å$ngström spatial resolution on a conventional uncorrected TEM. Different design aspects (fill-factor, pixel pattern, symmetry) were evaluated to understand their effect on the electron probe size and current density. Some proposed designs show a probe size ($d_{50}$) down to 0.66$Å$, proving that it should be possible to correct spherical aberration well past the 1Å~ limit using a programmable phase plate consisting of an array of electrostatic phase shifting elements.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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