使用脉冲keV离子束的传输中的飞行时间反冲检测实现了具有高深度分辨率的灵敏的多元素分布
Time-of-flight recoil detection in transmission using pulsed keV ion beams enables sensitive multi-element profiling with high depth resolution
摘要：
潜在的飞行时间反冲检测在传输几何使用脉冲keV离子束的薄膜和准2D系统的敏感的多元素配置文件进行评估。虽然飞行时间方法允许同时检测多个元素，在最大程度上不考虑反冲电荷状态，keV射弹能量保证高反冲截面，从而在低剂量下产生高灵敏度。我们展示了使用22 Ne和40 Ar作为射弹通过薄碳箔传输的方法的能力，该薄碳箔具有可选的LiF涂层和单晶硅膜，用于不同的样品制备程序和晶体取向。对于一个大的位置敏感探测器（0.13 sr），实现了低于6 nm的高深度分辨率和低于1014原子/cm 2的灵敏度。对于晶体目标，我们展示了如何创建和检测的反冲和它们所观察到的角分布的概率取决于样品的取向。
英文摘要：
The potential of time-of-flight recoil detection in transmission geometry using pulsed keV ion beams for sensitive multi-element profiling of thin membranes and quasi-2D systems is assessed. While the time-of-flight approach allows for simultaneous detection of multiple elements, to the largest extent irrespective of recoil charge states, the keV projectile energies guarantee high recoil-cross sections yielding high sensitivity at low dose. We demonstrate the capabilities of the approach using 22Ne and 40Ar as projectiles transmitted through thin carbon foil featuring optional LiF-coatings and single crystalline silicon membranes for different sample preparation routines and crystal orientations. For a large position sensitive detector (0.13 sr), a high-depth resolution below 6 nm and sensitivity below 1014 atoms/cm2 was achieved. For crystalline targets, we show how the probability of creation and detection of recoils and their observed angular distribution depend on sample orientation.
机构、总结、中文摘要均由AI分析而来，可能存在错误，请以论文正文为准。
