液态硅中凹形SiC {0001}表面的结构和形貌演化
Structure and morphology evolution of concave-shaped SiC {0001} surfaces in liquid silicon
摘要：
在纯液态硅中制备并重构了凹形4 H-SiC {0001}表面，研究了SiC表面的结构和形貌随方位角和离轴角的变化。在两个极性表面上显示出不同的表面特征，其中只有Si面反映了4 H-SiC晶体的六重对称性。在Si面上，沿方向的台阶聚束<1100>比沿方向的强<1120>，这与台阶边缘的键合状态有关。更显着的步骤聚束上观察到的C面，而它是不敏感的方位角取向。台阶刻面的程度在Si面上更强。在SiC {0001}表面的两个极性上，台阶面化与偏角无关。
英文摘要：
Concave-shaped 4H-SiC {0001} surfaces have been prepared and reconstructed in pure liquid silicon for investigating the structure and morphology evolution of the SiC surface as a function of both azimuthal and off-axis angles. Different surface characteristics are revealed on two polar surfaces where only the Si face reflects the six-fold symmetry of 4H-SiC crystal. On the Si face, the step bunching along the <1100> direction is stronger than the <1120> direction, which is related to the bonding state at the step edge. More significant step bunching is observed on the C face whereas it is not sensitive to azimuthal orientation. The extent of step faceting is stronger on the Si face. The step faceting is independent of the off angle on both polarities of SiC {0001} surfaces.
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