溅射功率对NiO薄膜电致变色性能的影响
Sputtering power effects on the electrochromic properties of NiO films
摘要：
采用射频磁控溅射技术在ITO玻璃基片上制备了氧化镍薄膜，研究了溅射功率（$P$ =60 W ~ 180 W）对薄膜电致变色性能的影响。通过X射线衍射（XRD）和扫描电子显微镜（SEM）分别评估晶体结构和形貌。采用循环伏安法和计时电流法研究了溅射功率对样品电致变色性能的影响。我们在碳酸丙烯酯溶液中使用LiClO $_4$用于Li插入/提取。利用X射线光电子能谱学（XPS）分析了锂离子插层前后样品的化学组成。我们观察到NiO的立方相，溅射功率主要影响结晶度和晶粒尺寸。这些又影响电致变色特性。显色效率从24.4 cm $^{2}$ /C降低到（15.4，13.7。16.1）cm $^{2}$ /C，当溅射功率从60 W增加到180 W时，可逆性从40%增加到30%。阻抗谱表明，在60 W下生长的薄膜的离子扩散较大，然后下降，在较高的溅射功率沉积的薄膜。XPS分析表明，较高的$P$值促进了膜表面氢氧化镍的形成。由于结晶度和形态的变化，氢氧化镍的存在增加，表明不仅样品的电致变色性能受溅射功率的影响，而且它们的化学组成。
英文摘要：
The effect of sputtering power ($P$=60 W-180 W) on the electrochromic properties of nickel oxide films deposited on ITO-coated glass substrates by the RF magnetron sputtering technique was investigated. Crystalline structure and morphology were assessed by X-ray diffraction (XRD) and scanning electron microscopy (SEM), respectively. The effect of sputtering power on electrochromism of the samples was evaluated with cyclic voltammetry and chronoamperometry. We used LiClO$_4$ in propilene carbonate solution for Li insertion/extraction. The chemical composition of the samples before and after Li intercalation was analyzed by X-ray photoelectron spectroscopy (XPS). We observed the cubic phase of NiO with sputtering power mainly affecting crystallinity and grain size. These in turn affect the electrochromic properties. Coloration efficiency reduces from 24.4 cm$^{2}$/C to (15.4, 13.7. 16.1) cm$^{2}$/C and the reversibility from 40% to 30% as sputtering power increases from 60 W to 180 W. The impedance spectra indicates that ion diffusion is larger for the film grown at 60 W and then goes down for the films deposited at higher sputtering powers. XPS analysis reveals that higher values of $P$ promote the formation of nickel hydroxides on the film surface. As consequence of changes in crystallinity and morphology, the presence of nickel hydroxides increases, showing that not only the electrochromic properties of the samples are affected by the sputtering power but also their chemical composition.
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