具有严格铸造工艺约束的光子器件逆向设计
Inverse design of photonic devices with strict foundry fabrication constraints
摘要：
我们介绍了一种新的方法，用于纳米光子器件的逆向设计，该方法保证所得到的设计满足严格的长度尺度约束-包括商业半导体代工厂所需的最小宽度和间距约束。该方法采用了机器学习中的若干概念，将具有严格长度尺度约束的拓扑优化问题转化为无约束随机梯度优化问题。具体来说，我们引入了一个条件生成器的可行设计，并采用了直通估计梯度的反向传播到一个潜在的设计。我们通过设计几个常见的集成光子器件来证明我们的方法的性能和可靠性。
英文摘要：
We introduce a new method for inverse design of nanophotonic devices which guarantees that resulting designs satisfy strict length scale constraints - including minimum width and spacing constraints required by commercial semiconductor foundries. The method adopts several concepts from machine learning to transform the problem of topology optimization with strict length scale constraints to an unconstrained stochastic gradient optimization problem. Specifically, we introduce a conditional generator for feasible designs and adopt a straight-through estimator for backpropagation of gradients to a latent design. We demonstrate the performance and reliability of our method by designing several common integrated photonic components.
机构、总结、中文摘要均由AI分析而来，可能存在错误，请以论文正文为准。
