用于感应载流子微波测量的电阻加载共面波导
Resistively loaded coplanar waveguide for microwave measurements of induced carriers
AI总结：
本研究提出用填充电阻膜的电阻加载共面波导（RLCPW）测量二维电子系统，其可作栅极调控面电荷密度，经Si MOSFET实验验证能将微波传输系数转换为耦合二维电子系统的电导率，还介绍了所需高阻膜的制备工艺。
摘要：
我们介绍了一种槽缝填充电阻膜的共面波导——电阻加载共面波导（RLCPW，resistively loaded coplanar waveguide）——在二维电子系统（2DES，two dimensional electron systems）测量中的应用。施加于承载2DES的样品上的RLCPW提供了用作栅极的均匀金属表面，以控制2DES的面电荷密度。作为该技术的验证，我们展示了在Si MOSFET上的测量结果，以及一个可成功将微波传输系数转换为与RLCPW电容耦合的邻近2DES电导率的模型。我们还介绍了制备RLCPW所需的高阻金属膜的工艺。
英文摘要：
We describe the use of a coplanar waveguide whose slots are filled with resistive film, a resistively loaded coplanar waveguide (RLCPW), to measure two dimensional electron systems (2DES). The RLCPW applied to the sample hosting the 2DES provides a uniform metallic surface serving as a gate, to control the areal charge density of the 2DES. As a demonstration of this technique we present measurements on a Si MOSFET, and a model that successfully converts microwave transmission coefficients into conductivity of a nearby 2DES capacitively coupled to the RLCPW. We also describe the process of fabricating the highly resistive metal film required for fabrication of the RLCPW.
机构、总结、中文摘要均由AI分析而来，可能存在错误，请以论文正文为准。
