静电探针测定负离子参数中异常现象的处理
Addressing the anomalies in determining negative ion parameters using electrostatic probes
摘要：
负离子密度和温度是量化负电性放电特性所必需的两个基本参数。然而，确定这些参数的装置的静电探针可以是相当具有挑战性的，因为固有的不准确性涉及确定的电子/离子饱和电流，电子温度和等离子体电位，这依赖于电荷粒子收集的探针表面;以及鞘层模型，最初开发的理想的碰撞少等离子体。本文简要回顾了与这些基本方法相关的各种限制，并提出了有用的手段来纠正在确定基于静电探针的负离子参数的异常。
英文摘要：
The negative ion density and temperature are the two fundamental parameters that are necessary to quantify the properties of electronegative discharges. However, determining these parameters by means of electrostatic probes can be quite challenging because of the inherent inaccuracies involved in determining the electron/ion saturation currents, electron temperatures and plasma potential, which relies on charge particle collection by the probe surface; as well as on the sheath models that are originally developed for an ideal collision-less plasma. This paper briefly reviews the various limitations associated with these underlying methods and suggests useful means to correct the anomaly associated in determining the negative ion parameters based on electrostatic probes.
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