利用扫描透射电子显微镜中的电子束诱导电流追踪硼向织构化硅太阳能电池中的扩散
Tracing boron diffusion into a textured silicon solar cell using electron beam induced current in a scanning transmission electron microscope
AI总结：
研究利用扫描透射电子显微镜中的电子束诱导电流及硼扩散模拟，追踪织构化硅太阳能电池中硼的掺杂剂分布，通过有效模型考虑表面复合，模拟与实验数据相符，还探讨了其在量化弱电场方面的应用。
摘要：
通过化学蚀刻（如用氢氧化钾）可增强[001]生长的单晶硅片的光吸收，形成金字塔状表面织构。这虽利于太阳能电池光子收集，但在测量异质结构中掺杂剂扩散行为时表面粗糙度有弊端。本文采用实验和模拟的扫描透射电子束诱导电流，结合硼扩散模拟，追踪金字塔状表面织构下的掺杂剂分布。为考虑表面复合，在电子束诱导电流模拟中使用沿电子束传播方向投影系统的有效模型，以便与二维实验图比较。模拟与实验数据吻合良好，并深入讨论了电子束诱导电流在未来实验中量化弱电场的应用。
英文摘要：
The light absorption of [001] grown single-crystalline silicon wafers can be enhanced by chemical etching, e.g., with potassium hydroxide, resulting in a pyramid-like surface texture. Alongside advantageous photon harvesting in solar cells, the surface roughness leads to drawbacks when measuring diffusion behaviour of dopants in the heterogeneous structure. In this paper, we employ experimental and simulated scanning transmission electron beam induced current in combination with simulation of boron diffusion in a self-consistent framework to trace the dopant distribution underneath the pyramid-like surface texture. In order to account for surface recombination, an effective model projecting the system along the electron beam propagation direction is used in the EBIC simulation enabling a comparison to entire two-dimensional experimental maps. We find a good agreement between simulated and experimental data and thoroughly discuss how EBIC can be used in future experiments to quantify weak electric fields.
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