超导纳米线单光子探测器（SNSPD）与3D打印自由形式微透镜
Superconducting Nanowire Single-Photon Detector (SNSPD) with 3D-Printed Free-Form Microlenses
摘要：
我们提出了一种方法，以增加超导纳米线单光子探测器（SNSPD）的有效光接收面积的自由形式的微透镜，原位印刷在敏感的探测器区域的顶部，使用高分辨率的多光子光刻。我们展示了一个探测器的基础上的氮化三铝（NbN）纳米线与4.5 $\mathrm μ$ m $\times$ 4.5 $\mathrm μ$ m的敏感区域，辅以60 $\mathrm μ$ m直径的镜头。对于波长为1550 nm的自由空间照明，透镜传感器的有效收集面积增加了100倍，从而大大提高了系统检测效率，而无需长纳米线。我们的方法可以很容易地应用到广泛的传感器类型，并有效地克服了固有的设计冲突之间的高计数速度，由于短的传感器复位时间，高定时精度，和高的制造产量一方面和高收集效率，通过大的有效检测领域的另一方面。
英文摘要：
We present an approach to increase the effective light-receiving area of superconducting nanowire single-photon detectors (SNSPD) by means of free-form microlenses that are printed in situ on top of the sensitive detector area using high-resolution multi-photon lithography. We demonstrate a detector based on a niobium-nitride (NbN) nanowire with a 4.5 $\mathrm μ$m $\times$ 4.5 $\mathrm μ$m sensitive area, supplemented with a lens of 60 $\mathrm μ$m diameter. For free-space illumination at a wavelength of 1550 nm, the lensed sensor has a 100-fold-increased effective collection area, which leads to strongly enhanced system detection efficiency without the need for long nanowires. Our approach can be readily applied to a wide range of sensor types and effectively overcomes the inherent design conflict between high counting speed due to short sensor reset time, high timing accuracy, and high fabrication yield on the one hand and high collection efficiency through large effective detection areas on the other hand.
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