可扩展通用可调虚波矢量空间频移超分辨率成像
Scalable universal tunable virtual-wavevector spatial frequency shift (TVSFS) super-resolution imaging
摘要：
材料科学、生物医学、生命科学等领域迫切需要发展一种具有大视场、深亚波长分辨率、荧光和非荧光样品兼容性的芯片超分辨成像技术。以往的片上超分辨成像方法主要集中在荧光和非荧光成像上，迫切需要一种能够兼容荧光和非荧光成像的通用成像技术。在这里，我们介绍了一种通用的超分辨率成像方法的基础上可调的虚拟波矢量空间频移（TVSFS），实现了标记和无标记的超分辨率成像在一个单一的精致制造的可扩展的光子芯片。理论上，TVSFS可以克服线性光学系统的衍射极限，使成像分辨率提高3倍以上，这是大多数基于空间频率工程的超分辨成像的局限性。在芯片表面制作衍射单元，以提供波矢可变的倏逝波照明，并在样品的傅里叶空间中诱导可调谐的深SFS。在GaP芯片上采用CMOS兼容工艺，可以实现无标记样品的λ/4.7分辨率和具有大FOV的标记样品的λ/7.1分辨率。大视场、高兼容性、高集成度的TVSFS芯片可以推动细胞工程、工业精密检测、化学研究等领域的发展。
英文摘要：
Developing a chip-based super-resolution imaging technique with large field-of-view (FOV), deep subwavelength resolution, and compatibility for both fluorescent and non-fluorescent samples is desired for material science, biomedicine, and life researches, etc. Previous on-chip super-resolution methods focus on either fluorescent or non-fluorescent imaging, putting an urgent requirement on the general imaging technique compatible with both of them. Here, we introduce a universal super-resolution imaging method based on tunable virtual-wavevector spatial frequency shift (TVSFS), realizing both labeled and label-free super-resolution imaging on a single delicately fabricated scalable photonic chip. Theoretically, with TVSFS, the diffraction limit of a linear optical system can be overcome, and the resolution can be improved more than three times, which is the limitation for most super-resolution imaging based on spatial frequency engineering. Diffractive units were fabricated on the chip's surface to provide a wavevector-variable evanescent wave illumination and induce tunable deep SFS in the samples' Fourier space. A resolution of λ/4.7 for the label-free sample and λ/7.1 for the labeled sample with a large FOV could be achieved with a CMOS-compatible process on a GaP chip. The large FOV, high-compatibility, and high-integration TVSFS chip may advance the fields like cell engineering, precision inspection in the industry, chemical research, etc.
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