高质量透射电子显微镜像差校正薄片的机器人制造
Robotic fabrication of high-quality lamellae for aberration-corrected transmission electron microscopy
摘要：
像差校正扫描透射电子显微镜（STEM）广泛用于材料的原子级成像。为了加速基于原子水平研究的新材料的发现，畸变校正STEM实验的吞吐量变得越来越重要。然而，像差校正STEM的完整工作流程的吞吐量仍然相当低。一个根本的问题是，高质量的薄STEM样品（薄片）的制备依赖于手动操作。在这里，受到“机器人科学家”最近成功的启发，我们展示了使用全自动化软件通过聚焦离子束（FIB）制造高质量薄片的机器人。首先，我们表明，机器人FIB可以准备laminate具有很高的成功率，其中机器人FIB控制粗铣，抬出，和最终细化过程。在此基础上，对单晶硅最终减薄工艺的FIB参数进行了优化。这些硅激光器的像差校正STEM成像显示具有55 pm分辨率的原子级图像。我们还展示了机器人制造高品质的SrTiO 3和蓝宝石薄片。机器人FIB系统将解决目前畸变校正STEM分析整个工作流程的瓶颈，并加速基于原子级成像的材料发现。
英文摘要：
Aberration-corrected scanning transmission electron microscopy (STEM) is widely used for atomic-level imaging of materials. To accelerate the discovery of new materials based on atomic-level investigations, the throughput of aberration-corrected STEM experiments becomes more and more important. However, the throughput of the full workflow of aberration-corrected STEM is still quite low. A fundamental problem is that the preparation of high-quality thin STEM samples (lamellae) depends on manual operation. Here, inspired by the recent successes of "robot scientists", we demonstrate robotic fabrication of high-quality lamellae by focused-ion-beam (FIB) with full automation software. First, we show that robotic FIB can prepare lamellae with a high success rate, where the robotic FIB controls rough-milling, lift-out, and final-thinning processes. Then, we optimize the FIB parameters of the final-thinning process for single crystal Si. Aberration-corrected STEM imaging of these Si lamellae shows atomic-level images with 55 pm resolution. We also demonstrate robotic fabrication of high-quality lamellae of SrTiO3 and sapphire. The robotic FIB system will resolve the current bottleneck of the full workflow of aberration-corrected STEM analysis and accelerate materials discovery based on atomic-level imaging.
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