二维纳米机械板谐振器的法布里-珀罗干涉校准
Fabry-Perot Interferometric Calibration of 2D Nanomechanical Plate Resonators
AI总结：
本文提出一种基于法布里-珀罗干涉的校准方法，用于原位确定二维纳米机械板谐振器的厚度、间隙和运动振幅，并提取模态半径、有效质量等关键参数，适用于多种腔体配置。
摘要：
纳米机械板谐振器的位移校准是一项具有挑战性的任务。较大的纳米机械谐振器厚度会因其增加的弹簧常数和质量以及独特的反射率而降低谐振器运动的振幅。在此，我们展示了通过利用法布里-珀罗腔中的基本干涉现象，可以原位确定圆形和椭圆形鼓形谐振器的板厚度、谐振器间隙高度和运动振幅。所提出的校准方案利用光学对比度来揭示厚度和间隔层高度分布，并重用这些结果将光电探测器信号转换为在线性区域内由电动势驱动的鼓面的位移。校准后的频率响应和空间模式图能够提取鼓面材料的模态半径、有效质量、有效驱动力和杨氏弹性模量。该方案适用于任何法布里-珀罗腔配置，包括板和膜谐振器。
英文摘要：
Displacement calibration of nanomechanical plate resonators presents a challenging task. Large nanomechanical resonator thickness reduces the amplitude of the resonator motion due to its increased spring constant and mass, and its unique reflectance. Here, we show that the plate thickness, resonator gap height, and motional amplitude of circular and elliptical drum resonators, can be determined in-situ by exploiting the fundamental interference phenomenon in Fabry-Perot cavities. The proposed calibration scheme uses optical contrasts to uncover thickness and spacer height profiles, and reuse the results to convert the photodetector signal to the displacement of drumheads that are electromotively driven in their linear regime. Calibrated frequency response and spatial mode maps enable extraction of the modal radius, effective mass, effective driving force, and Young's elastic modulus of the drumhead material. This scheme is applicable to any configuration of Fabry-Perot cavities, including plate and membrane resonators.
机构、总结、中文摘要均由AI分析而来，可能存在错误，请以论文正文为准。
