实用分数阶变增益超扭曲控制及其在光刻系统硅片台中的应用
Practical Fractional-Order Variable-Gain Super-Twisting Control with Application to Wafer Stages of Photolithography Systems
摘要：
提出了一种实用的分数阶变增益超扭曲算法（PFVSTA），以提高半导体制造中硅片台的跟踪性能。该方法基于滑模控制（SMC），从三个方面提高了系统的跟踪性能：1）通过超扭算法和分数阶滑模面设计来抑制抖振现象; 2）通过分数阶滑模面设计来改善滑模面上状态的动态特性，使其具有快速响应和小超调;结合实际情况，分析了控制器的稳定性，阐述了补偿加速度引起的不确定性的理论原理。此外，数值仿真证明了所提出的滑模面和控制方案的有效性，它们与理论分析是一致的。最后进行了基于实践的对比实验。仿真结果表明，所提出的PFVSTA可以实现更好的跟踪性能比传统的方法从各个角度来看。
英文摘要：
In this paper, a practical fractional-order variable-gain super-twisting algorithm (PFVSTA) is proposed to improve the tracking performance of wafer stages for semiconductor manufacturing. Based on the sliding mode control (SMC), the proposed PFVSTA enhances the tracking performance from three aspects: 1) alleviating the chattering phenomenon via super-twisting algorithm and a novel fractional-order sliding surface~(FSS) design, 2) improving the dynamics of states on the sliding surface with fast response and small overshoots via the designed novel FSS and 3) compensating for disturbances via variable-gain control law. Based on practical conditions, this paper analyzes the stability of the controller and illustrates the theoretical principle to compensate for the uncertainties caused by accelerations. Moreover, numerical simulations prove the effectiveness of the proposed sliding surface and control scheme, and they are in agreement with the theoretical analysis. Finally, practice-based comparative experiments are conducted. The results show that the proposed PFVSTA can achieve much better tracking performance than the conventional methods from various perspectives.
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