Microelectromechanical system (MEMS) focal plane array (FPA) with optical readout offers exciting opportunities for real-time terahertz (THz) imaging. However, conventional FPA suffers from a low THz absorption ratio, which further decreases the performance of THz imaging. Here, we present a simple and scalable approach for the realization of THz focal plane metamaterial array with a relatively high absorption ratio. The key idea is to combine the advantages of substrate-free structures with metamaterial. A 100 x100 THz FPA with a 150 x 150 μm pixel is designed, fabricated, and characterized. The dependence of the THz absorption ratio on the thickness of SiNx dielectric substrate film is investigated. The fabricated FPA exhibits a 90.6% resonant absorption at 1.36 THz, agreeing considerably with the theoretical simulation results. Our results imply that such a substrate-free THz focal plane metamaterial array enables the realization of THz imaging.
The implementation of terahertz (THz) wafer-level metadevices is critical to advance the science for applications including (I) integrated focal plane array which can image for biology and (II) integrated narrowband absorbers for high spectral resolution THz spectroscopy. Substantial progress has been made in the development of THz metamaterials; however, a wafer-level low-stress THz metadevices platform remains a challenge. This paper experimentally demonstrates a substrate-free THz metadevices platform adopting engineered Si-rich and low-stress silicon nitride (SiNx) thin films, achieving an…
Metamaterial-based absorbers have been extensively investigated in the terahertz (THz) range with ever increasing performances. In this paper, we propose an all-dielectric THz absorber based on doped silicon. The unit cell consists of a silicon cross resonator with an internal cross-shaped air cavity. Numerical results suggest that the proposed absorber can operate from THz to mid-infrared, having an average power absorption of >95% between 0.6 and 10 THz. Experimental results using THz time-domain spectroscopy show a good agreement with simulations. The underlying mechanisms for broadband abs…
Terahertz (THz) metamaterials have been developed for THz sensing, detection, imaging, and many other functions due to their unusual absorbers. However, the unusual absorption spectra change with different incident angles. Thus, we designed and fabricated a focal plane array with metal-insulator-metal (MIM) structure metamaterial absorbers for further research. The absorption spectrum with incident angles from 20 to 60 was measured using THz time-domain spectroscopy (THz-TDS), and the experimental results reveal that the absorption spectrum changes with incident angle variations. A basic analy…
Driven by a myriad of potential applications such as communications, medical imaging, security, spectroscopy, and so on, terahertz (THz) technology has emerged as a rapidly growing technological field during the last three decades. However, since conventional materials typically used in microwave and optical frequencies are lossy or do not effectively respond at these frequencies, it is essential to find or develop novel materials that are suitable for device applications in the THz range. Therefore, there is wide interest in the community in employing novel naturally-occurring materials, such…
In this paper, a photonic crystal containing graphene and metamaterial layers is investigated. The absorption spectrum of the structure in the terahertz range is obtained using the transfer matrix method. The results show that by adding a Si, SiO2 or metamaterial layer between two graphene layers, the terahertz absorption increases significantly. The results also reveal that in wide range of physical parameters, the approximately complete absorption occurs. Furthermore, the results indicate that the structure with metamaterial layer has the highest absorption performance.
Optical activity (polarization rotation of light) is one of the most desired features of chiral media, as it is important for many polarization related applications. However, in the THz region, chiral media with strong optical activity are not available in nature. Here, we study theoretically, and experimentally a chiral metamaterial structure composed of pairs of vertical U-shape resonators of "twisted" arms, and we reveal that it demonstrates large pure optical activity (i.e. optical activity associated with negligible transmitted wave ellipticity) in the low THz regime. The experimental dat…
We provide an analysis of the electromagnetic modes of three-dimensional metamaterial resonators in the THz frequency range. The fundamental resonance of the structures is fully described by an analytical circuit model, which not only reproduces the resonant frequencies but also the coupling of the metamaterial with an incident THz radiation. We also evidence the contribution of the propagation effects, and show how they can be reduced by design. In the optimized design the electric field energy is lumped into ultra-subwavelength ($λ$/100) capacitors, where we insert semiconductor absorber bas…
This letter proposes a 50:50 TE terahertz (THz) power splitter based on digitized metamaterials. The device is optimized using particle swarm optimization algorithm. The structure of the digitized metamaterials contains circular air holes in silicon slab which are deposited on silicon dioxide substrate. The optimized structure shows insertion loss (IL) of less than 3.9 dB over the frequency range of 0.9-1.1 THz. The proposed device has the footprint of 400 $\times$ 350 $μ$m$^2$. The proposed device has excellent merits such as compactness, efficient, all-dielectric, and compatible with CMOS fa…
We demonstrate a high temperature performance quantum detector of Terahertz (THz) radiation based on three-dimensional metamaterial. The metamaterial unit cell consists of an inductor-capacitor (LC) resonator laterally coupled with antenna elements. The absorbing region, consisting of semiconductor quantum wells is contained in the strongly ultra-subwavelength capacitors of the LC structure. The high radiation loss of the antenna allows strongly increased collection efficiency for the incident THz radiation, while the small effective volume of the LC resonator allows intense light-matter coupl…
Metasurfaces are engineered thin surfaces comprising two dimensional (2D) arrays of sub-wavelength spaced and sub-wavelength sized resonators. Metasurfaces can locally manipulate the amplitude, phase and polarization of light with high spatial resolution. In this study, we report numerical and experimental results of a vortex-beam-generating metasurface fabricated specifically for infrared (IR) and terahertz (THz) wavelengths. The designed metasurface consisted of a 2D array of dielectric cross-shaped resonators with spatially varying length, thereby providing desired spatially varying phase s…
Intensity, wavevector, phase, and polarization are the most important parameters of any light beam. Understanding the wavevector distribution has emerged as a very important problem in recent days, especially at nanoscale. It provides unique information about the light-matter interaction. Back focal plane or Fourier plane imaging and spectroscopy techniques help to measure wavevector distribution not only from single molecules and single nanostructures but also from metasurfaces and metamaterials. This review provides a birds-eye view on the technique of back focal imaging and spectroscopy, di…
