用于相关显微镜自动配准的计算机可读图像标记autoCRIM
Computer-readable Image Markers for Automated Registration in Correlative Microscopy autoCRIM
摘要：
我们提出了一种新开发的方法，使用计算机可读的基准标记，使图像从多个成像模式自动注册。这种方法使得有可能将来自许多表面成像技术的图像关联起来，以提供纳米尺度上前所未有的表面细节水平，这是任何一种技术都无法单独提供的。这种方法提供了在将样品从一台机器无缝转移到另一台机器时导航到特定感兴趣区域的能力。然后从扫描电子显微镜（SEM）、二次离子质谱（SIMS）、X射线光电子能谱学（XPS）、原子力显微镜（AFM）和光学检查工具获取数据，并将所有获取的数据组合，然后生成表面的3D数据代表模型。
英文摘要：
We present a newly developed methodology using computer-readable fiducial markers to allow images from multiple imaging modalities to be registered automatically. This methodology makes it possible to correlate images from many surface imaging techniques to provide an unprecedented level of surface detail on a nanometre scale that no one technique can provide alone. This methodology provides the capability to navigate to specific areas of interest when transferring samples from machine to machine seamlessly. Then taking data acquired from Scanning Electron Microscope (SEM), Secondary Ion Mass Spectrometry (SIMS), x-ray Photoelectron Spectroscopy (XPS), Atomic Force Microscopy (AFM) and optical inspection tools and combining all the data acquired to then generate a 3D data representative model of a surface.
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