用于与二维材料集成的高质量Fabry-Perot微腔的微机械组装
Micro- Mechanical assembly of high-quality Fabry-Perot microcavities for the integration with two-dimensional materials
摘要：
将二维半导体的单层集成在平面和潜在的微结构微腔中是具有挑战性的，因为很少有可用的方法来过度生长单层而不损坏它们。已经开发了一些策略，但它们要么依赖于复杂的实验设置、昂贵的技术，要么损害可用的品质因数。因此，高质量的法布里-珀罗微腔并没有广泛应用于关注原子级薄材料的轻物质耦合的社区。在这里，我们提供的细节，最近开发的技术，微机械组装法布里-珀罗微腔。我们的方法不依赖于困难或昂贵的技术，并产生设备的特点，标志着最先进的集成原子级薄半导体腔。
英文摘要：
Integrating monolayers of two-dimensional semiconductors in planar, and potentially microstructured microcavities is challenging because of the few, available approaches to overgrow the monolayers without damaging them. Some strategies have been developed, but they either rely on complicated experimental settings, expensive technologies or compromise the available quality factors. As a result, high quality Fabry-Perot microcavities are not widely available to the community focusing on light-matter coupling with atomically thin materials. Here, we provide details on a recently developed technique to micro-mechanically assemble Fabry-Perot Microcavities. Our approach does not rely on difficult or expensive technologies, and yields device characteristics marking the state of the art in cavities with integrated atomically thin semiconductors.
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