一类扫描探针显微镜非线性动力学的解析解
An analytical solution for nonlinear dynamics of one kind of scanning probe microscopes
摘要：
研究了探针与样品间非线性相互作用力对原子力显微镜动力学行为的影响。利用三次多项式模拟了微梁自由端的受力情况。研究了一些参数对AFM动力学特性的影响。结果表明，在样品和悬臂梁同时振动的情况下，AFM的频率响应对针尖质量不敏感。在同相和反相振动的情况下，研究了样品振动的影响。结果表明，虽然样品的振动幅值与悬臂梁的振幅相比很小，但它对悬臂梁的共振频率有很大的影响。
英文摘要：
The dynamic behavior of AFM is studied taking into account the nonlinear interaction forces between probe and sample. The exerted forces on the free end of micro-beam are simulated with the third degree polynomial. The effect of some parameters on the dynamics of AFM is studied. The results show that the frequency response of AFM is not sensitive to the tip mass in the case of both the sample and cantilever vibration. The effect of sample vibration is studied in the case of in-phase and anti-phase vibration. The results show that although the vibration amplitude of sample is very small compared to the amplitude of cantilever, it has great effect on the resonant frequency of the cantilever.
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