银浆中Bi2O3玻璃粉对欧姆接触制备的影响及其在p型硅基太阳能电池和集成电路中的潜在作用
The influence of Bi2O3 glass powder in silver paste on the fabrication of ohmic contacts and its potential effectiveness in solar cells and integrated circuits on p-type silicon substrates
摘要：
目前的工作严格调查的影响，低熔点玻璃上的金属接触的制造，与铋基氧化物玻璃和丝网印刷银接触用于集成电路（IC），太阳能电池和传感器的应用的目标。在这项研究中，新的电极接触制造的丝网印刷复合浆料组成的主要银粉，Bi 2 O3玻璃粉，和非环状粘合剂，然后在带式炉中烧制的浆料。采用X射线衍射（XRD）和转移长度法（TLM）分析了不同腐蚀条件下复合膜在830 ~ 890 °C烧成后的微观结构。通过差热分析（DTA）、扫描电镜（SEM）、电子探针X射线微区分析（EPMA）、二次离子质谱（SIMS）和透射电镜（TEM）等测试手段，研究了Bi 2 O3玻璃对银浆性能的影响。以确定Bi 2 O3与银混合的效果以及所得金属接触在IC制造中的功效。据观察，添加剂，Bi 2 O3玻璃，控制的银到玻璃中的熔融，影响银微晶的沉淀。此外，在烧成温度的增加引起的Ag微晶的过度生长和电流泄漏，和Ag微晶的尺寸和Bi 2 O3玻璃中的关系被确认。
英文摘要：
The present work critically investigates the influence of low melting glasses on the fabrication of metal contacts, with the goal of advancing applications of bismuth based oxide glass and screen printed silver contacts for use in integrated circuits (ICs), solar cells, and sensors. In this study, novel electrode contacts were fabricated by screen printing composite pastes composed of mainly silver powder, Bi2O3 glass powder, and acyclic binder, and then firing the pastes in a belt furnace. The microstructures of the composite films after firing at 830 to 890 °C were observed under different corrosion conditions, and the resulting layers were analyzed with X ray diffraction (XRD) and the transfer length method (TLM). A series of investigations to determine the influence of Bi2O3 glass in silver paste involved various tests, including differential thermal analysis (DTA), scanning electron microscopy (SEM), electron probe X ray microanalysis (EPMA), secondary ion mass spectrometry (SIMS) and transmission electron microscopy (TEM), to determine the effects of Bi2O3 mixed with silver and the efficacy of the resulting metal contacts in IC fabrications. It was observed that the additive, Bi2O3 glass, controlled the melting of the silver into the glass, influencing the precipitation of Ag crystallites. In addition, an increase in the firing temperature caused excessive growth of Ag crystallites and current leakage, and the size and the relationship of the Ag crystallites in the Bi2O3 glass were confirmed.
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