利用压电滞后用于稳定形状配置的高像素数可变形反射镜概念
High pixel number deformable mirror concept utilizing piezoelectric hysteresis for stable shape configurations
摘要：
介绍了滞后变形镜的概念设计和初步研制。HDM是一种全新的方法来设计和操作的变形镜波前校正在先进的成像系统。关键的技术突破是高滞后压电材料的应用与简单的电极布局相结合，以有效地定义单个致动器像素。HDM基于新开发的压电材料的大残余变形的设置和忘记性质，便于使用时分复用（TDM）来寻址单个像素，而不需要高更新频率来避免像素漂移。这与简单的电极布局相结合，为放大到极高像素数（$\geq 128\times 128$）和像素密度（$100/mm^2$）的可变形反射镜（DM）铺平了道路，这对于世界上一些最先进的成像系统中的高空间频率波前校正非常重要。
英文摘要：
We present the conceptual design and initial development of the Hysteretic Deformable Mirror (HDM). The HDM is a completely new approach to the design and operation of deformable mirrors for wavefront correction in advanced imaging systems. The key technology breakthrough is the application of highly hysteretic piezoelectric material in combination with a simple electrode layout to efficiently define single actuator pixels. The set-and-forget nature of the HDM, which is based on the large remnant deformation of the newly developed piezo material, facilitates the use of time division multiplexing (TDM) to address the single pixels without the need for high update frequencies to avoid pixel drift. This, in combination with the simple electrode layout, paves the way for upscaling to extremely high pixel numbers ($\geq 128\times 128$) and pixel density ($100/mm^2$) deformable mirrors (DMs), which is of great importance for high spatial frequency wavefront correction in some of the most advanced imaging systems in the world.
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