基于图像直方图的次级电子计数法评价SEM的量子效率
Image-Histogram-based Secondary Electron Counting to Evaluate Detective Quantum Efficiency in SEM
摘要：
扫描电子显微镜是有机和无机材料纳米级成像的有力工具。表征这些显微镜性能极限的一个重要指标是检测量子效率（DQE），它测量由SE检测器检测到的发射次级电子（SE）的分数。然而，用于测量DQE的常用技术将SE发射过程近似为泊松分布，这可能导致不正确的DQE值。在本文中，我们介绍了一种测量DQE的技术，在该技术中，我们直接计数的平均数次级电子检测到的样品使用图像直方图。该技术不假设SE的泊松分布，并且使得可以针对更宽范围的成像条件精确地测量DQE。作为我们的技术的演示，我们映射DQE的变化作为显微镜中的工作距离的函数。
英文摘要：
Scanning electron microscopy is a powerful tool for nanoscale imaging of organic and inorganic materials. An important metric for characterizing the limits of performance of these microscopes is the Detective Quantum Efficiency (DQE), which measures the fraction of emitted secondary electrons (SEs) that are detected by the SE detector. However, common techniques for measuring DQE approximate the SE emission process to be Poisson distributed, which can lead to incorrect DQE values. In this paper, we introduce a technique for measuring DQE in which we directly count the mean number of secondary electrons detected from a sample using image histograms. This technique does not assume Poisson distribution of SEs and makes it possible to accurately measure DQE for a wider range of imaging conditions. As a demonstration of our technique, we map the variation of DQE as a function of working distance in the microscope.
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