Nanoelectromechanical Sensors based on Suspended 2D Materials

Graphene ribbons with suspended masses as transducers in ultra-small nanoelectromechanical accelerometers

Nanoelectromechanical system (NEMS) sensors and actuators could be of use in the development of next generation mobile, wearable, and implantable devices. However, these NEMS devices require transducers that are ultra-small, sensitive and can be fabricated at low cost. Here, we show that suspended double-layer graphene ribbons with attached silicon proof masses can be used as combined spring-mass and piezoresistive transducers. The transducers, which are realized using processes that are compatible with large-scale semiconductor manufacturing technologies, can yield NEMS accelerometers that oc…

基于纳米机电压力传感器中悬浮石墨烯基异质结构的二维换能器建模与仿真

Modeling and Simulation of 2D Transducers Based on Suspended Graphene-Based Heterostructures in Nanoelectromechanical Pressure Sensors

本研究利用COMSOL软件构建了基于石墨烯基异质结构的纳米机电压力传感器模型，模拟了圆形等不同形状二维膜的力学响应，测算了多种异质结构的杨氏模量，为高性能NEMS压力传感器设计提供指导。

可在LiNbO3薄膜上利用GHz Lamb波声子晶体实现的可部署纳米机电连续体束缚态

Deployable Nanoelectromechanical Bound States in the Continuum Enabled by GHz Lamb Wave Phononic Crystals on LiNbO3 Thin Films

本文提出在LiNbO3薄膜上利用GHz Lamb波声子晶体实现可部署纳米机电连续体束缚态，通过打破对称性实现高Q特性，为芯片集成BIC提供新途径。

Nanomechanical resonators fabricated by atomic layer deposition on suspended 2D materials

Atomic layer deposition (ALD), a layer-by-layer controlled method to synthesize ultrathin materials, provides various merits over other techniques such as precise thickness control, large area scalability and excellent conformality. Here we demonstrate the possibility of using ALD growth on top of suspended 2D materials to fabricate nanomechanical resonators. We fabricate ALD nanomechanical resonators consisting of a graphene/MoS$_2$ heterostructure. Using AFM indentation and optothermal drive, we measure their mechanical properties including Young's modulus, resonance frequency and quality fa…

用于传感器的封闭腔上方高产率大规模悬浮石墨烯膜

High-yield large-scale suspended graphene membranes over closed cavities for sensor applications

本研究提出“热干法”转移工艺，解决封闭腔上方大面积石墨烯膜制备难题，提升了单层及双层CVD石墨烯悬浮膜产率，经多种表征验证后应用于压阻式压力传感器，且可拓展至其他二维材料。

Mapping nanoscale dynamic properties of suspended and supported multi-layer graphene membranes via contact resonance and ultrasonic scanning probe microscopies

Graphene (GR) remarkable mechanical and electrical properties - such as its Young's modulus, low mass per unit area, natural atomic flatness and electrical conductance - would make it an ideal material for micro and nanoelectromechanical systems (MEMS and NEMS). However, the difficulty of attaching GR to supports coupled with naturally occurring internal defects in a few-layer GR can significantly adversely affect the performance of such devices. Here, we have used a combined contact resonance atomic force microscopy (CR-AFM) and ultrasonic force microscopy (UFM) approach to characterise and m…