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arXiv 2007.11907physics.app-phcond-mat.mes-hallphysics.ins-det
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一种耦合三维原子尺度分析和原位光致发光光谱的光子原子探针

A Photonic Atom Probe coupling 3D Atomic Scale Analysis with in situ Photoluminescence Spectroscopy

Jonathan Houard, Antoine Normand, Enrico Di Russo, Christian Bacchi, Pradip Dalapati, Georges Beainy, Simona Moldovan, Gerald Da Costa, Fabien Delaroche, Charly… 展开作者

Jonathan Houard, Antoine Normand, Enrico Di Russo, Christian Bacchi, Pradip Dalapati, Georges Beainy, Simona Moldovan, Gerald Da Costa, Fabien Delaroche, Charly Vaudolon, Jean Michel Chauveau, Maxime Hugues, Didier Blavette, Bernard Deconihout, Angela Vella, François Vurpillot, Lorenzo Rigutti

备注：
22 pages, 4 figures. The following article has been accepted by the Review of Scientific Instruments. After it is published, it will be found at https://publishing.aip.org/resources/librarians/products/journals/
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摘要：

激光辅助原子探针层析成像（La-APT）中表面原子的激光增强场蒸发可以同时激发半导体或绝缘样品的光致发光。配备适当的聚焦和收集光学系统的原子探针已与原位微光致发光（μPL）工作台耦合，该工作台可在APT分析期间操作。我们开发的光子原子探针仪器工作频率高达500 kHz，并由150 fs激光脉冲控制，在大光谱范围内（从深紫外到近红外）能量可调。使用320 mm焦距光谱仪进行微PL光谱分析，该光谱仪配备有用于时间积分的CCD相机和用于时间分辨采集的条纹相机。该仪器在多量子阱氧化物异质结构样品上的应用实例说明了这种新一代层析原子探针的潜力。

英文摘要：

Laser enhanced field evaporation of surface atoms in Laser-assisted Atom Probe Tomography (La-APT) can simultaneously excite phtotoluminescence in semiconductor or insulating specimens. An atom probe equipped with appropriate focalization and collection optics has been coupled with an in-situ micro-Photoluminescence (μPL) bench that can be operated during APT analysis. The Photonic Atom Probe instrument we have developped operates at frequencies up to 500 kHz and is controlled by 150 fs laser pulses tunable in energy in a large spectral range (spanning from deep UV to near IR). Micro-PL spectroscopy is performed using a 320 mm focal length spectrometer equipped with a CCD camera for time-integrated and with a streak camera for time-resolved acquisitions. An exemple of application of this instrument on a multi-quantum well oxide heterostructure sample illustrates the potential of this new generation of tomographic atom probe.

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