软化学辅助的纳米结构石英基压电微机电系统的片上集成
Soft chemistry assisted On-chip Integration of Nanostructured quartz-based Piezoelectric Microelectromechanical System
摘要：
先进的压电石英微机电系统的传感和精确的频率控制应用的发展需要这种材料的纳米结构和芯片上的硅集成。然而，目前的石英制造方法是基于在硅上键合块体微机械晶体，这限制了石英微器件的尺寸、性能、集成成本和可扩展性。在这里，我们结合化学溶液沉积，软纳米压印光刻和自上而下的微细加工工艺，开发第一个纳米结构的外延100石英100硅压电悬臂梁。与硅绝缘体硅技术衬底上的受控纳米结构相结合的相干硅石英界面和膜厚度提供了高的力和质量灵敏度，同时保持了微机电系统的机械品质因数。这项工作证明，生物相容性纳米结构的外延压电石英硅基MEMS可以在低成本的软化学和自顶向下光刻技术相结合的工程。
英文摘要：
The development of advanced piezoelectric quartz MEMS for sensing and precise frequency control applications requires the nanostructuration and on chip integration on silicon of this material. However, the current quartz manufacturing methods are based on bonding bulk micromachined crystals on silicon, which limits the size, the performance, the integration cost and the scalability of quartz micro devices. Here, we combine chemical solution deposition, soft nanoimprint lithography and top down microfabrication processes to develop the first nanostructured epitaxial 100 quartz 100 Si piezoelectric cantilevers. The coherent Si quartz interface and film thinness combined with a controlled nanostructuration on silicon insulator silicon technology substrates provides high force and mass sensitivity while preserving the mechanical quality factor of the microelectromechanical systems. This work proves that biocompatible nanostructured epitaxial piezoelectric quartz based MEMS on silicon can be engineered at low cost by combining soft chemistry and top down lithographic techniques.
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