一种用于高速随机存取轴向聚焦的环形分区阵列
A micromirror array with annular partitioning for high-speed random-access axial focusing
摘要：
动态轴向聚焦功能最近已广泛应用于显微镜、增强/虚拟现实（AR/VR）、自适应光学和材料处理中。然而，现有变焦工具的局限性继续困扰调动这种功能的光学系统的性能能力和操作开销。驱动负担最小的变焦工具（例如：液晶、弹性体或光流体透镜）的刷新率较低（约100 Hz）。相反，最快的设备牺牲了诸如其驻留容量（例如：声学梯度透镜或单片微机械镜）的关键能力或低操作开销（例如，可变形反射镜）。在这里，我们提出了一种通用的随机访问轴向聚焦装置，通过采用利用散焦相位分布的鲁棒性的低刚度微镜来桥接这些以前相互冲突的高速、住宅容量和轻量化驱动器的特征。在几何上，该装置由直径为8.2mm的活塞运动阵列和48 μ m间距的像素组成，其为短于1100 nm的波长提供2 pi相移，其中10- 90%的稳定在64.8 μ s（即，15.44 kHz刷新率）。像素被电划分为32个环，用于驱动方案，该方案实现具有圆形对称的相位缠绕操作，并且每个通道需要小于30 V。光学实验表明，该阵列的广泛的聚焦范围与测量能力，以目标29个不同的，可分辨的深度平面。总的来说，所提出的阵列的功能提供了解决复杂应用的紧凑，直接方法的潜力，包括神经生物学中的高通量单细胞靶向和AR/VR中密集3D视觉信息的传递。
英文摘要：
Dynamic axial focusing functionality has recently experienced widespread incorporation in microscopy, augmented/virtual reality (AR/VR), adaptive optics, and material processing. However, the limitations of existing varifocal tools continue to beset the performance capabilities and operating overhead of the optical systems that mobilize such functionality. The varifocal tools that are the least burdensome to drive (ex: liquid crystal, elastomeric or optofluidic lenses) suffer from low (~ 100 Hz) refresh rates. Conversely, the fastest devices sacrifice either critical capabilities such as their dwelling capacity (ex: acoustic gradient lenses or monolithic micromechanical mirrors) or low operating overhead (e.g., deformable mirrors). Here, we present a general-purpose random-access axial focusing device that bridges these previously conflicting features of high speed, dwelling capacity and lightweight drive by employing low-rigidity micromirrors that exploit the robustness of defocusing phase profiles. Geometrically, the device consists of an 8.2 mm diameter array of piston-motion and 48 um-pitch micromirror pixels that provide 2pi phase shifting for wavelengths shorter than 1 100 nm with 10-90 % settling in 64.8 us (i.e., 15.44 kHz refresh rate). The pixels are electrically partitioned into 32 rings for a driving scheme that enables phase-wrapped operation with circular symmetry and requires less than 30 V per channel. Optical experiments demonstrated the array's wide focusing range with a measured ability to target 29 distinct, resolvable depth planes. Overall, the features of the proposed array offer the potential for compact, straightforward methods of tackling bottlenecked applications including high-throughput single-cell targeting in neurobiology and the delivery of dense 3D visual information in AR/VR.
机构、总结、中文摘要均由AI分析而来，可能存在错误，请以论文正文为准。
