纳米金刚石薄膜的结构、拉曼和光致发光研究：原料中氨的影响
Structural, Raman and photoluminescence studies on nanocrystalline diamond films: Effects of ammonia in feedstock
摘要：
在此，我们报告的结构质量的改善和增强的光致发光（PL）发射的最佳N掺杂的纳米金刚石（NCD）薄膜。采用热丝化学气相沉积法，以NH_3：CH_4：H_2为原料，在不同的N/C比（即0，0.13，0.35，0.50和0.75）下，在Si衬底上制备了纯金刚石薄膜和N掺杂金刚石薄膜。X射线衍射分析表明，随着原料中N/C比的增加，微晶尺寸先增大后减小。此外，金刚石拉曼谱线的线宽和峰位的单调增加表明金刚石晶格中的压缩应变作为N/C比的函数增加到0.50。然而，在0.75的较高N/C比下，压缩应变稍微松弛并产生较低的应变。此外，观察到1195 cm-1处的独特拉曼模式，对应于C=N-H振动，表明NCD薄膜中存在显着的N浓度。此外，可见光和紫外光致发光的研究表明，存在几个N相关的颜色中心与多个发射线在380至700 nm的范围内。在原料中N/C比为0.35时生长的最佳N掺杂金刚石膜显示出在约505和700 nm处的室温PL发射的显著增强。在355和532 nm激光激发下，这种PL增强归因于H3和其他与N相关的缺陷中心的聚集体。
英文摘要：
Herein, we report on the improvement of structural quality and enhancement of photoluminescence (PL) emission for an optimally N doped nanocrystalline diamond (NCD) film. Pure and N doped nanocrystalline diamond films are synthesized on Si by hot filament chemical vapour deposition using NH3:CH4:H2 at different nominal N/C ratios viz. 0, 0.13, 0.35, 0.50 and 0.75 in feedstock. X ray diffraction analysis reveal a systematic initial increase and then a decrease in crystallite size with N/C ratio in feedstock. Further, a monotonic increase in Raman line width and peak position of diamond band indicates that the compressive strain in diamond lattice increases as a function of N/C ratio upto 0.50. However, at higher N/C ratio of 0.75, the compressive strain gets relaxed a little and produces a lower strain. Furthermore, a unique Raman mode at 1195 cm-1 is observed corresponding to the C=N-H vibrations indicating a significant N concentration in the NCD films. In addition, visible and UV PL studies reveal the presence of several N related color centres with multiple emission lines in the range of 380 to 700 nm. An optimally N doped diamond film grown at N/C ratio of 0.35 in feedstock shows a significant enhancement in room temperature PL emission at about 505 and 700 nm. This PL enhancement is attributed to H3 and other aggregates of N related defect centres, under 355 and 532 nm laser excitations respectively.
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