采用单片光子技术的O波段亚波长光栅滤波器
O-Band Subwavelength Grating Filters in a Monolithic Photonics Technology
AI总结：
针对亚波长光栅滤波器因特征尺寸小难工业化的问题，采用格罗方德单片光子技术制备O波段SWG滤波器，实现低损耗、高消光比等优异性能，验证了其工业可制造性。
摘要：
为克服性能瓶颈并满足消费者需求，数据通信行业已开始在数据中心中从电互连向光互连转型。为降低这一变革带来的相关成本，并实现5G及更下一代网络的性能，亟需探索可在光子集成电路中通过波分复用（Wavelength-Division Multiplexing, WDM）实现高带宽互连的先进光子器件。亚波长光栅（Subwavelength Grating, SWG）滤波器已在WDM应用中展现出巨大潜力，但实现这类结构所需的极小特征尺寸，一直阻碍其进入工业应用。为探究工业场景下SWG滤波器的可制造性与性能，我们利用格罗方德（GLOBALFOUNDRIES, GF）的单片光子技术，制备并表征了O波段亚波长光栅滤波器。我们实现了低至-1.2 dB的下路信道损耗（带平顶响应）、-30 dB的高消光比、5 nm的3 dB信道宽度，以及无形状畸变的单源热调谐能力。该滤波器结构采用GF提供的产品设计库中的元件设计，以0.002 mm²的紧凑尺寸实现功能，最小特征尺寸为150 nm。
英文摘要：
The data communications industry has begun transitioning from electrical to optical interconnects in datacenters in order to overcome performance bottlenecks and meet consumer needs. To mitigate the costs associated with this change and achieve performance for 5G and beyond, it is crucial to explore advanced photonic devices that can enable high-bandwidth interconnects via wavelength-division multiplexing (WDM) in photonic integrated circuits. Subwavelength grating (SWG) filters have shown great promise for WDM applications. However, the small feature sizes necessary to implement these structures have prohibited them from penetrating into industrial applications. To explore the manufacturability and performance of SWG filters in an industrial setting, we fabricate and characterize O-band subwavelength grating filters using the monolithic photonics technology at GLOBALFOUNDRIES (GF). We demonstrate a low drop channel loss of -1.2 dB with a flat-top response, a high extinction ratio of -30 dB, a 3 dB channel width of 5 nm and single-source thermal tunability without shape distortion. This filter structure was designed using elements from the product design kit provided by GF and functions in a compact footprint of 0.002 mm2 with a minimum feature size of 150 nm.
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