胶体光刻法制备钙钛矿纳米晶金属薄膜中的纳微米孔
Nano- and microscale apertures in metal films fabricated by colloidal lithography with perovskite nanocrystals
摘要：
我们展示了基于钙钛矿纳米晶体的剥离的金属表面的图案化，其使得能够在不使用基于抗蚀剂的纳米光刻的情况下制造纳米尺寸的特征。钙钛矿纳米晶体作为模板，用于定义金属层中孔的形状，我们利用可以在胶体合成中控制的各种尺寸和形状来演示尺寸小于可见光谱中的光的波长的纳米孔、纳米间隙和波导的制造。该工艺可以很容易地与标准光刻和蚀刻技术集成，以创建更复杂的结构。
英文摘要：
We demonstrate patterning of metal surfaces based on lift-off of perovskite nanocrystals that enables the fabrication of nanometer-size features without the use of resist-based nanolithography. The perovskite nanocrystals act as templates for defining the shape of the apertures in metal layers, and we exploit the variety of sizes and shapes that can be controlled in the colloidal synthesis to demonstrate the fabrication of nanoholes, nanogaps and guides with size smaller than the wavelength of light in the visible spectrum. The process can be readily integrated with standard lithography and etching techniques for the creation of more complex structures.
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