We present fast tunable superconducting microwave resonators fabricated from planar NbN on a sapphire substrate. The $3λ/4$ wavelength resonators are tuning fork shaped and tuned by passing a dc current which controls the kinetic inductance of the tuning fork prongs. The $λ/4$ section from the open end operates as an integrated impedance converter which creates a nearly perfect short for microwave currents at the dc terminal coupling points, thus preventing microwave energy leakage through the dc lines. We measure an internal quality factor $Q_{\rm int}>10{^{5}}$ over the entire tuning range. We demonstrate a tuning range of $> 3\%$ and tuning response times as short as 20 ns for the maximum achievable detuning. Due to the quasi-fractal design, the resonators are resilient to magnetic fields of up to 0.5 T.
Hybrid superconducting--spin systems offer the potential to combine highly coherent atomic quantum systems with the scalability of superconducting circuits. To fully exploit this potential requires a high quality-factor microwave resonator, tunable in frequency and able to operate at magnetic fields optimal for the spin system. Such magnetic fields typically rule out conventional Al-based Josephson junction devices that have previously been used for tunable high-$Q$ microwave resonators. The larger critical field of niobium (Nb) allows microwave resonators with large field resilience to be fab…
We have realized different honeycomb lattices for microwave photons in the 4 to 8 GHz band using superconducting spiral resonators. Each lattice comprises a few hundred sites. Two designs have been studied, one leading to two bands touching at the Dirac points and one where a gap opens at the Dirac points. Using a scanning laser technique to image the eigenmodes of this new type of photonic lattices, we are able to reconstruct their band structure. The measured bands are in excellent agreement with ab initio models that combine numerical simulations of the electromagnetic properties of the spi…
This paper introduces the first tunable ferroelectric capacitor (FeCAP) based unreleased RF MEMS resonator, integrated seamlessly in Texas Instruments' 130nm Ferroelectric RAM (FeRAM) technology. An array of FeCAPs in this complementary metal-oxide-semiconductor (CMOS) technology's back-end-of-line (BEOL) process were used to define the acoustic resonance cavity as well as the electromechanical transducers. To achieve high quality factor (Q) of the resonator, acoustic waveguiding for vertical confinement within the CMOS stack is studied and optimized. Additional design considerations are discu…
Circuit quantum electrodynamics (QED) employs superconducting microwave resonators as quantum buses. In circuit QED with semiconductor quantum-dot-based qubits, increasing the resonator impedance is desirable as it enhances the coupling to the typically small charge dipole moment of these qubits. However, the gate electrodes necessary to form quantum dots in the vicinity of a resonator inadvertently lead to a parasitic port through which microwave photons can leak, thereby reducing the quality factor of the resonator. This is particularly the case for high-impedance resonators, as the ratio of…
Interfacing superconducting microwave resonator with rare earth doped crystals presents a promising hybrid quantum system for applications including spin-assisted transducers and memories. The coupling strength between spins of rare earth ions and the microwave photons is characterized by the cooperativity. Here we report an ultra-high cooperativity $C \sim$ 650 between rare earth spins and a planar superconducting microwave resonator that features a highly uniform magnetic field for harnessing the strong anisotropic coupling strength of erbium doped yttrium orthosilicate. This cooperativity r…
A cylindrical-water-resonator-based absorber with ultra-broad operating band at microwave band is demonstrated theoretically and experimentally for the first time. By utilizing dielectric resonator (DR) mode and spoof surface plasmon polariton (SPP) mode of the cylindrical water resonators, the proposed absorber owns an absorptivity higher than 90% over almost the whole ultra-broad operating band from 5.58 GHz to 24.21 GHz, with a relative bandwidth as high as 125%. The angular tolerance and thermal stability of the proposed absorber are simulated and the results indicate the good performance …
In this paper, a new design of optical delay line based on coupled ring resonators in photonic crystals is proposed and analyzed by means of numerical simulation in CST Microwave Studio. The performance of the proposed photonic crystal ring resonator (PhCRR) based coupled resonant optical waveguide (CROW) is compared to: point-defect cavity based coupled cavity waveguides (CCW) in photonic crystal. microring resonator (MRR) based CROW. The suggested design addresses compactness issues of the MRR CROW while offering normalized delay values better than CCW and comparable to MRR CROW. The PhCRR C…
We have designed honeycomb lattices for microwave photons with a frequency imbalance between the two sites in the unit cell. This imbalance is the equivalent of a mass term that breaks the lattice inversion symmetry. At the interface between two lattices with opposite imbalance, we observe topological valley edge states. By imaging the spatial dependence of the modes along the interface, we obtain their dispersion relation that we compare to the predictions of an ab initio tight-binding model describing our microwave photonic lattices.
We report on the design, fabrication, and characterization of compact tunable yttrium iron garnet (YIG) based RF resonators based on $μ$m-sized spin-wave cavities. Inductive antennas with both ladder and meander configurations were used as transducers between spin waves and RF signals. The excitation of ferromagnetic resonance and standing spin waves in the YIG cavities led to sharp resonances with quality factors up to 350. The observed spectra were in excellent agreement with a model based on the spin-wave dispersion relations in YIG, showing a high magnetic field tunability of about 29 MHz/…
We report the experimental demonstration of tunable asymmetric acoustic metasurfaces with extreme contrast, made by two decorated membrane resonators (DMRs) coupled via a sealed air column. The front side of the metasurface is impedance matched to air and perfectly absorbing, while the backside is hard and totally reflecting. When a suitable DC voltage is applied to the backside DMR with proper electrodes, the surface impedance of the back side of the metasurfaces can be tuned from one extreme to the other, such that the backside becomes impedance matched to air and totally absorbing, while th…
We have designed, fabricated, and characterized magnetostatic wave (MSW) resonators on a chip. The resonators are fabricated by patterning single-crystal yttrium iron garnet (YIG) film on a gadolinium gallium garnet (GGG) substrate and excited by loop-inductor transducers. We achieved this technology breakthrough by developing a YIG film etching process and fabricating thick aluminum coplanar waveguide (CPW) inductor loop around each resonator to individually address and excite MSWs. At 4.77 GHz, the 0.68 square mm resonator achieves a quality factor Q > 5000 with a bias field of 987 Oe. We al…
Microring resonators are critical photonic components used in filtering, sensing and nonlinear applications. To date, the development of high performance microring resonators in LNOI has been limited by the sidewall angle, roughness and etch depth of fabricated rib waveguides. We present large free spectral range microring resonators patterned via electron beam lithography in high-index contrast $Z$-cut LNOI. Our microring resonators achieve an FSR greater than 5 nm for ring radius of 30 $μ$m and a large 3 dB resonance bandwidth. We demonstrate 3 pm/V electro-optic tuning of a 70 $μ$m-radius r…
Microwave reflectance probed photoconductivity (or $μ$-PCD) measurement represents a contactless and non-invasive method to characterize impurity content in semiconductors. Major drawbacks of the method include a difficult separation of reflectance due to dielectric and conduction effects and that the $μ$-PCD signal is prohibitively weak for highly conducting samples. Both of these limitations could be tackled with the use of microwave resonators due to the well-known sensitivity of resonator parameters to minute changes in the material properties combined with a null measurement. A general mi…
A split-ring resonator is a prototype of meta-atom in metamaterials. Though noble metal-based split-ring resonators have been extensively studied, up to date, there is no experimental demonstration of split-ring resonators made from graphene, an emerging intriguing plasmonic material. Here, we experimentally demonstrate graphene split-ring resonators with deep subwavelength (about one hundredth of the excitation wavelength) magnetic dipole response in the terahertz regime. Meanwhile, the quadrupole and electric dipole are observed,depending on the incident light polarization. All modes can be …
We have developed and tested a doubly tunable resonator, with the intention to simulate fast motion of the resonator boundaries in real space. Our device is a superconducting coplanar-waveguide half-wavelength microwave resonator, with fundamental resonant frequency ~5 GHz. Both of its ends are terminated by dc-SQUIDs, which serve as magnetic-flux-controlled inductances. Applying a flux to either SQUID allows tuning of the resonant frequency by approximately 700 MHz. By using two separate on-chip magnetic-flux lines, we modulate the SQUIDs with two tones of equal frequency, close to twice that…
Fano resonance is widely discussed in designing novel terahertz components, such as sensors, filters, modulators, and group delay modules. Usually, high quality (Q) factor and flexible tunability of Fano resonance are key requirements for these applications. Here, we present tunable terahertz Fano resonance with a Q factor of 2095 at 0.439 THz in coupled terahertz whispering-gallery-mode resonators (WGMRs). Coupling between a relatively low Q (578) quartz ring and a high Q (2095) silicon ring is employed to generate the Fano resonance. The resonant frequency of the Fano resonance can be active…
We demonstrate a continuously RF tunable orthogonally polarized optical single sideband (OP-OSSB) generator based on dual cascaded micro-ring resonators. By splitting the input double sideband signal into an orthogonally polarized carrier and lower sideband via TE- and TM-polarized MRRs, an OP-OSSB signal is generated. A large tuning range of the optical carrier to sideband ratio of up to 57.3 dB is achieved by adjusting the polarization angle of the input light. The operation RF frequency of the OP-OSSB generator can be continuously tuned with a 21.4 GHz range via independent thermal control …
In quantum computing architectures, one important factor is the trade-off between the need to couple qubits to each other and to an external drive and the need to isolate them well enough in order to protect the information for an extended period of time. In the case of superconducting circuits, one approach is to utilize fixed frequency qubits coupled to coplanar waveguide resonators such that the system can be kept in a configuration that is relatively insensitive to noise. Here, we propose a scalable voltage-tunable quantum memory (QuMem) design concept compatible with superconducting qubit…
The performance of superconducting circuits for quantum computing is limited by materials losses. In particular, coherence times are typically bounded by two-level system (TLS) losses at single photon powers and millikelvin temperatures. The identification of low loss fabrication techniques, materials, and thin film dielectrics is critical to achieving scalable architectures for superconducting quantum computing. Superconducting microwave resonators provide a convenient qubit proxy for assessing performance and studying TLS loss and other mechanisms relevant to superconducting circuits such as…
We demonstrate conversion of up to 4.5 GHz-frequency microwaves to 1500 nm-wavelength light using optomechanical interactions on suspended thin-film lithium niobate. Our method utilizes an interdigital transducer that drives a free-standing 100 $μ$m-long thin-film acoustic resonator to modulate light travelling in a Mach-Zehnder interferometer or racetrack cavity. Owing to the strong microwave-to-acoustic coupling offered by the transducer in conjunction with the strong photoelastic, piezoelectric, and electro-optic effects of lithium niobate, we achieve a half-wave voltage of $V_π$ = 4.6 V an…
