arXivDaily arXiv每日学术速递 周一至周五更新
arXiv 2001.05022eess.IVcs.CV

Machine Learning Pipeline for Segmentation and Defect Identification from High Resolution Transmission Electron Microscopy Data

University of California Berkeley(加州大学伯克利分校);Lawrence Berkeley National Laboratory(劳伦斯伯克利国家实验室)

C. K. Groschner, Christina Choi, M. C. Scott

英文摘要:

In the field of transmission electron microscopy, data interpretation often lags behind acquisition methods, as image processing methods often have to be manually tailored to individual datasets. Machine learning offers a promising approach for fast, accurate analysis of electron microscopy data. Here, we demonstrate a flexible two step pipeline for analysis of high resolution transmission electron microscopy data, which uses a U-Net for segmentation followed by a random forest for detection of stacking faults. Our trained U-Net is able to segment nanoparticle regions from amorphous background with a Dice coefficient of 0.8 and significantly outperforms traditional image segmentation methods. Using these segmented regions, we are then able to classify whether nanoparticles contain a visible stacking fault with 86% accuracy. We provide this adaptable pipeline as an open source tool for the community. The combined output of the segmentation network and classifier offer a way to determine statistical distributions of features of interest, such as size, shape and defect presence, enabling detection of correlations between these features.

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