小型阳极离子源
Small anode ion source
摘要：
为了有效地产生离子束和延长离子源的使用寿命，提出了离子源的改进方案。采用沿磁场取向的小阳极细棒，提高了Bernas型离子源的电离效率。小阳极的横向电场在交叉场中通过漂移将等离子体输运到发射狭缝。阴极材料回收的优化用于增加操作寿命。壁电位的优化用于抑制薄片形成。一个三电极提取系统进行了优化，低能量束流的生产和有效的空间电荷中和。从BF_3气体放电中引出了发射电流密度达60 mA/cm ~ 2的离子束。
英文摘要：
Ion source modification is proposed for efficient production of ion beam and extending of operating Lifetime. Ionization efficiency of the Bernas type ion source has been improved by using a small anode-thin rod, oriented along the magnetic field. The transverse electric field of small anode transport plasma by drift in crossed field to the emission slit. Optimization of the cathode material recycling is used to increase the operating lifetime. Optimization of the wall potential is used for suppression of flakes formation. A three-electrode extraction system was optimized for low energy beam production and efficient space charge neutralization. An ion beam with emission current density up to 60 mA/cm2 has been extracted from discharge in BF3 gas.
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