单飞秒laser脉冲与云母相互作用
Single femtosecond laser pulse interaction with mica
摘要：
与金属和半导体相比，超快、飞秒激光脉冲与电介质材料的相互作用表明，对于激光材料改性，例如激光烧蚀，电介质材料具有显著更高的激光通量阈值要求。玻璃的实例是晶体材料，例如石英和蓝宝石，以及非晶玻璃。已经发现，在具有可忽略的线性吸收的波长处的飞秒激光脉冲与电介质之间的相互作用很弱，因此通常使用多脉冲照射以观察显著且可量化的效果。在这项研究中，电介质是晶体，层状，天然矿物白云母，云母与分子式KAl_2（Si_3 Al）O_10（OH）_2。白云母，新的分裂，被用于广泛的技术和科学应用，包括作为绝缘材料的电子产品和作为一个超平和超净基板。发现单一的、~800 nm波长、~6微米光斑尺寸、~150 fs激光脉冲导致激光修改拓扑结构的系统范围，作为单一激光脉冲的能量密度的函数，包括材料的块体去除。飞秒激光脉冲/材料的相互作用是大于预期的标准电介质在给定的能量密度。光学表面轮廓和FESEM被用来表征拓扑结构。对比这两种技术的结果支持使用光学表面轮廓来表征材料改性，尽管与FESEM相比，其在横向分辨率上存在局限性。层间矿水含量的天然白云母提出的主要原因，云母行为不同的标准电介质时，用一个单一的800 nm飞秒激光脉冲照射。
英文摘要：
Ultrafast, femtosecond laser pulse interaction with dielectric materials has shown them to have significantly higher laser fluence threshold requirements, as compared to metals and semiconductors, for laser material modification, such as laser ablation. Examples of dielectrics are crystalline materials such as quartz and sapphire, and amorphous glasses. The interaction between femtosecond laser pulses, at a wavelength with negligible linear absorption, and a dielectric has been found to be weak, and multiple pulse irradiation is therefore typically used in order to see significant and quantifiable effects. In this study the dielectric is the crystalline, layered, natural mineral muscovite, a mica with formula KAl_2 (Si_3 Al) O_10 (OH)_2. Muscovite, newly cleaved, is used in a wide range of technological and scientific applications including as an insulating material in electronics and as an ultra-flat and ultra-clean substrate. A single, ~800 nm wavelength, ~6 micron spotsize, ~150 fs laser pulse is found to lead to a systematic range of laser modification topologies, as a function of the fluence of the single laser pulse, including bulk removal of material. The fs laser pulse/material interaction is greater than expected for a standard dielectric at a given fluence. Optical surface profiling and FESEM are used to characterise the topologies. Contrasting the results of the two techniques supports the use of optical surface profiling to characterise the material modification despite its limitations in lateral resolution as compared to FESEM. The interlayer mineral water content of natural muscovite is proposed as the primary reason that mica behaves differently to a standard dielectric when irradiated with a single 800 nm fs laser pulse.
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