复合膜电容式压力传感器的建模与有限元仿真
Modeling and FEM-based Simulations of Composite Membrane based Circular Capacitive Pressure Sensor
摘要：
在基于微电子机械系统（MEMS）的压力传感器和声学装置中，膜的偏转被用于压力或声音测量。由于电容式压力传感器优于压阻式压力传感器（低功耗、对温度漂移不敏感、更高的动态范围、高灵敏度），电容式压力传感器是压阻式压力传感器之后第二大可用的基于MEMS的传感器。我们提出了一种正常的电容式压力传感器，用于连续感测正常和异常的眼内压（IOP）。该传感器的复合膜由三种材料制成，Si、SiO2和Si3N4。本文讨论了薄膜的挠度、电容变化、机械灵敏度、电容灵敏度和非线性。数学建模进行分析模拟，这也是比较与有限元法（FEM）模拟。MATLAB用于分析模拟，CoventorWare用于有限元模拟。薄膜挠度分析结果的变化。在最大压力为8kPa时，有限元计算结果的误差约为7.19%，电容的误差约为2.7%。非线性度为4.2492%，用于表面微加工工艺制造的传感器。
英文摘要：
In Micro-electro-mechanical Systems (MEMS) based pressure sensors and acoustic devices, deflection of a membrane is utilized for pressure or sound measurements. Due to advantages of capacitive pressure sensor over piezoresistive pressure sensors (low power consumption, less sensitive to temperature drift, higher dynamic range, high sensitivity), capacitive pressure sensors are the 2nd largest useable MEMS-based sensor after piezoresistive pressure sensors. We present a normal capacitive pressure sensor, for continuous sensing of normal and abnormal Intraocular Pressure (IOP). The composite membrane of the sensor is made of three materials, i.e., Si, SiO2 and Si3N4. The membrane deflection, capacitance variation, mechanical sensitivity, capacitive sensitivity and non-linearity are discussed in this work. Mathematical modeling is performed for analytical simulation, which is also compared with Finite Element Method (FEM) simulations. MATLAB is used for analytical simulations and CoventorWare is used for FEM simulations. The variation in analytical result of deflection in membrane w.r.t. FEM result is about 7.19%, and for capacitance, the variation is about 2.7% at maximum pressure of 8 kPa. The non-linearity is about 4.2492% for the proposed sensor for fabrication using surface micro-machining process.
机构、总结、中文摘要均由AI分析而来，可能存在错误，请以论文正文为准。
