一种用于光谱红外传感的片上四波长热释电传感器
An On-Chip Quad-Wavelength Pyroelectric Sensor for Spectroscopic Infrared Sensing
摘要：
将光子结构和光电传感器合并到单个芯片中可以产生可以测量物质光谱的芯片上传感器光谱设备。在这项工作中，我们提出并实现了片上并发多波长红外（IR）传感器。制作的四波长红外传感器表现出四个不同的窄带光谱响应，在正常入射以下的预先设计的共振在中波长红外区域，对应于大气窗口。该器件可用于实际的光谱应用，如非色散红外传感器，红外化学成像设备，高温计，光谱热成像。
英文摘要：
Merging photonic structures and optoelectronic sensors into a single chip may yield a sensor-on-chip spectroscopic device that can measure the spectrum of matters. In this work, we propose and realize an on-chip concurrent multi-wavelength infrared (IR) sensor. The fabricated quad-wavelength IR sensors exhibit four different narrowband spectral responses at normal incidence following the pre-designed resonances in the mid-wavelength infrared region that corresponds to the atmospheric window. The device can be applied for practical spectroscopic applications such as non-dispersive IR sensors, IR chemical imaging devices, pyrometers, and spectroscopic thermography imaging.
机构、总结、中文摘要均由AI分析而来，可能存在错误，请以论文正文为准。
