Wide-angle optical functionality is crucial for implementation of advanced imaging and image projection devices. Conventionally, wide-angle operation is attained by complicated assembly of multiple optical elements. Recent advances in nanophotonics have led to metasurface lenses or metalenses, a new class of ultra-thin planar lenses utilizing subwavelength nanoantennas to gain full control of the phase, amplitude, and/or polarization of light. Here we present a novel metalens design capable of performing diffraction-limited focusing and imaging over an unprecedented > 170 degree angular field of view (FOV). The lens is monolithically integrated on a one-piece flat substrate and involves only a single layer of metasurface that corrects third-order Seidel aberrations including coma, astigmatism, and field curvature. The metalens further features a planar focal plane, which enables considerably simplified system architectures for applications in imaging and projection. We fabricated the metalens using Huygens meta-atoms operating at 5.2 micron wavelength and experimentally demonstrated aberration-free focusing and imaging over the entire FOV. The design concept is generic and can be readily adapted to different meta-atom geometries and wavelength ranges to meet diverse application demands.
Active metasurfaces, whose optical properties can be modulated post-fabrication, have emerged as an intensively explored field in recent years. The efforts to date, however, still face major performance limitations in tuning range, optical quality, and efficiency especially for non mechanical actuation mechanisms. In this paper, we introduce an active metasurface platform combining phase tuning covering the full 2$π$ range and diffraction-limited performance using an all-dielectric, low-loss architecture based on optical phase change materials (O-PCMs). We present a generic design principle en…
We introduce the resonant metalens, a cluster of coupled subwavelength resonators. Dispersion allows the conversion of subwavelength wavefields into temporal signatures while the Purcell effect permits an efficient radiation of this information in the far-field. The study of an array of resonant wires using microwaves provides a physical understanding of the underlying mechanism. We experimentally demonstrate imaging and focusing from the far-field with resolutions far below the diffraction limit. This concept is realizable at any frequency where subwavelength resonators can be designed.
Metalenses can achieve diffraction-limited focusing through localized phase manipulation of the incoming light beam. Because these structures are ultrathin, less than a wavelength, this has the potential of achieving ultrathin optical elements, with a thickness limited mainly by the mechanical strength of the transparent substrate. Recently proposed metalenses are based on either dielectric nanofin arrays, or nanoparticles of large number, which leads to severe manufacturing challenges. To overcome these challenges, this paper predicts a new type of metalens with concentric-nanoring topology, …
Metalenses, artificially engineered subwavelength nanostructures to focus light within ultrathin thickness, promise potential for a paradigm shift of conventional optical devices. However, the aperture sizes of metalenses are usually bound within hundreds of micrometers by the commonly-used scanning-based fabrication methods, limiting their usage on practical optical devices like telescopes. Here, for the first time, we demonstrate a high-efficiency, single-lens, refractive metalens telescope. We developed a mass production-friendly workflow for fabricating wafer-scale (80-mm aperture) metalen…
In recent years, the need for high-power laser is of great interest for different applications ranging from direct-laser processing, light detection, medicine, and lighting. However, high-power lasers with high intensities give rise to fundamental problems for optical detectors and imaging systems with low threshold damage, which still need reliable solutions. Here, we report and numerically demonstrate a hybrid system that synergically combines a broadband optical power limiter with a transmittance difference between on-state (70^o C) and off-state (25^o C) about 62.5%, and a diffraction-limi…
The scalability of optical addressing is one of the key challenges for the large-scale trapped-ion quantum computing (QC). Metasurfaces is a promising solution due to excellent optical performance, integration, and miniaturization. Here, we propose and numerically demonstrate a design of integrated scalable metalens array (ISMA) working in the UV 350nm range for optical addressing. These ISMAs can focus the collimated individual addressing beams array into diffraction-limited spots array, featuring crosstalk below 0.82%, focusing efficiency as high as 36.90%. For various applications, the x-po…
We demonstrate the fabrication of diffraction-limited dielectric metasurface lenses for NIR by use of standard industrial high throughput silicon processing techniques: UV Nano Imprint Lithography (UV-NIL) combined with continuous Reactive Ion Etching (RIE) and pulsed Bosch Deep Reactive Ion Etching (DRIE). As the research field of metasurfaces moves towards applications these techniques are relevant as potential replacements of commonly used cost-intensive fabrication methods utilizing Electron Beam Lithography. We show that washboard-type sidewall surface roughness arising from the Bosch DRI…
Metasurface optics provide an ultra-thin alternative to conventional refractive lenses. A present challenge is in realizing metasurfaces that exhibit tunable optical properties and achromatic behavior across the visible spectrum. Here, we report the design, fabrication, and characterization of metasurface lenses ("metalenses") that use asymmetric TiO2 nanostructures to induce a polarization-dependent optical response. By rotating the polarization of linearly-polarized input light, the focal length of a 40 micrometer-diameter metalens is tuned from 220-550 micrometers with nearly diffraction-li…
Metasurfaces have attracted widespread attention due to an increasing demand of compact and wearable optical devices. For many applications, polarization-insensitive metasurfaces are highly desirable and appear to limit the choice of their constituent elements to isotropic nanostructures. This greatly restricts the degrees of geometric parameters available in designing each nanostructure. Here, we demonstrate a polarization-insensitive metalens using otherwise anisotropic nanofins which offer additional control over the dispersion and phase of the output light. As a result, we can render a met…
Metasurfaces have the potential to miniaturize and improve the performance of any optical element, with applications spanning telecommunications, computing and wearable optics. However, the ability to retain functionality over a continuous, broad range of wavelengths is essential for their widespread adoption. So far, efforts to achieve this have been limited to either a reflection configuration or operation at wavelengths other than the visible. Here, we show that by judicious choice of nanostructures, one can independently control both the phase and group delay, leading to broadband transmis…
Design strategies for efficient, fabrication-feasible extreme-ultraviolet metalens
Friedrich Schiller University Jena（耶拿弗里德里希·席勒大学）；Institute of Applied Physics, Abbe Center of Photonics（应用物理研究所，阿贝光学中心）；Fraunhofer Institute for Applied Optics and Precision Engineering IOF（弗劳恩霍夫应用光学和精密工程研究所 IOF）；Helmholtz Institute Jena（耶拿赫尔姆霍茨研究所）；GSI Helmholtzzentrum für Schwerionenforschung（GSI 重离子研究中心）；Max Plank School of Photonics（马克斯·普朗克光子学院）
This is the second article in a series of two dealing with the concept of "resonant metalens" we introduced recently [Phys. Rev. Lett. 104, 203901 (2010)]. It is a new type of lens capable of coding in time and radiating efficiently in the far field region sub-diffraction information of an object. A proof of concept of such a lens is performed in the microwave range, using a medium made out of a square lattice of parallel conducting wires with finite length. We investigate a sub-wavelength focusing scheme with time reversal and demonstrate experimentally spots with focal widths of λ/25. Throug…
To define and characterize optical systems, obtaining information on the amplitude, phase, and polarization profile of optical beams is of utmost importance. Polarimetry using bulk optics is well established to characterize the polarization state. Recently, metasurfaces and metalenses have successfully been introduced as compact optical components. Here, we take the metasurface concept to the system level by realizing arrays of metalens 2*3 sub-arrays, allowing to determine the polarization profile of an optical beam. We use silicon-based metalenses with a numerical aperture of 0.32 and a mean…
Ultrathin and flat optical lenses are essential for modern optical imaging, spectroscopy, and energy harvesting. Dielectric metasurfaces comprising nanoscale quasi-periodic resonator arrays are promising for such applications, as they can tailor the phase, amplitude, and polarization of light at subwavelength resolution, enabling multi-functional optical elements. To achieve 2πphase coverage, however, most dielectric metalenses need a thickness comparable to the wavelength, requiring fabrication of high-aspect-ratio scattering elements. Here, we report ultrathin dielectric metalenses made of v…
Solid-state quantum emitters have emerged as robust single-photon sources and addressable spins: key components in rapidly developing quantum technologies for broadband magnetometry, biological sensing, and quantum information science. Performance in these applications, be it magnetometer sensitivity or quantum key generation rate, is limited by the number of photons detected. However, efficient collection of a quantum emitter's photoluminescence (PL) is challenging as its atomic scale necessitates diffraction-limited imaging with nanometer-precision alignment, oftentimes at cryogenic temperat…
As one of nanoscale planar structures, metasurface has shown excellent superiorities on manipulating light intensity, phase and/or polarization with specially designed nanoposts pattern. It allows to miniature a bulky optical lens into the chip-size metalens with wavelength-order thickness, playing an unprecedented role in visible imaging systems (e.g. ultrawide-angle lens and telephoto). However, a CMOS-compatible metalens has yet to be achieved in the visible region due to the limitation on material properties such as transmission and compatibility. Here, we experimentally demonstrate a dive…
Optical components, such as lenses, have traditionally been made in the bulk form by shaping glass or other transparent materials. Recent advances in metasurfaces provide a new basis for recasting optical components into thin, planar elements, having similar or better performance using arrays of subwavelength-spaced optical phase-shifters. The technology required to mass produce them dates back to the mid-1990s, when the feature sizes of semiconductor manufacturing became considerably denser than the wavelength of light, advancing in stride with Moore's law. This provides the possibility of un…
The numerical aperture (NA) of a lens determines its ability to focus light and its resolving capability. Having a large NA is a very desirable quality for applications requiring small light-matter interaction volumes or large angular collections. Traditionally, a large NA lens based on light refraction requires precision bulk optics that ends up being expensive and is thus also a specialty item. In contrast, metasurfaces allow the lens designer to circumvent those issues producing high NA lenses in an ultra-flat fashion. However, so far, these have been limited to numerical apertures on the s…
Wide field-of-view (FOV) optics are widely used in various imaging, display, and sensing applications. While conventional wide FOV optics rely on cascading multiple elements to suppress coma and other aberrations, it has recently been demonstrated that diffraction-limited, near-180 degree FOV operation can be achieved with a single-piece flat fisheye lens designed via iterative numerical optimization [Nano Lett. 20, 7429(2020)]. Here we derive an analytical solution to enable computationally efficient design of flat wide FOV lenses based on metasurfaces or diffractive optical elements (DOEs). …
One of the important advantages of optical metasurfaces over conventional diffractive optical elements is their capability to efficiently deflect light by large angles. However, metasurfaces are conventionally designed using approaches that are optimal for small deflection angles and their performance for designing high numerical aperture devices is not well quantified. Here we introduce and apply a technique for the estimation of the efficiency of high numerical aperture metasurfaces. The technique is based on a particular coherent averaging of diffraction coefficients of periodic blazed grat…
We demonstrate imaging over the visible band using a single planar diffractive lens. This is enabled via multi-level diffractive optics that is designed to focus over a broad wavelength range, which we refer to as an achromatic diffractive lens (ADL). We designed, fabricated and characterized two ADLs with numerical apertures of 0.05 and 0.18. Diffraction-limited focusing is demonstrated for the NA=0.05 lens with measured focusing efficiency of over 40% across the entire visible spectrum (450nm to 750nm). We characterized the lenses with a monochromatic and a color CMOS sensor, and demonstrate…
Harvard John A. Paulson School of Engineering and Applied Sciences, Harvard University（哈佛大学约翰·A·保尔森工程与应用科学学院）；Corning Research and Development Corporation, Corning Inc.（康宁研发公司，康宁公司）；Department of Applied Physics and Science Education, Eindhoven University of Technology（埃因霍温理工大学应用物理与科学教育部）
Label-free observation of nanoparticles by far-field optical microscopy is challenging because their ability to scatter or absorb light dramatically diminishes with decreasing size. Surface plasmon resonance (SPR) and localized surface plasmon resonance (LSPR) imaging have shown promises and respective limitations. For instance, it is challenging to achieve diffraction-limited resolution in SPR imaging; its refractive index sensitivity is not as localized as desired. LSPR imaging is typically employed with dark-field microscopy on sparse noble metal nanostructures, leading to low light through…
