面向垂直梯度凝固晶体生长过程的模型基控制
Towards model based control of the Vertical Gradient Freeze crystal growth process
AI总结：
针对垂直梯度凝固晶体生长过程中的两相Stefan问题，提出基于输出反馈的跟踪控制设计，结合同位与平坦性状态反馈及平坦性近似观测器，通过仿真验证了近似质量与控制性能。
摘要：
本文针对垂直梯度凝固（Vertical Gradient Freeze）过程建模中出现的两相Stefan问题，提出了基于输出反馈的跟踪控制设计。由两个耦合自由边界问题组成的两相Stefan问题，因生长过程中固体和液体域的时间变化范围，是许多晶体生长过程的关键部分。在讨论该过程的特殊需求后，进行了同位和基于平坦性的状态反馈设计。为完善该设置，利用原始分布参数系统的基于平坦性的近似进行了观测器设计。通过多次仿真分析了所提供近似的质量以及开环和闭环控制设置的性能。
英文摘要：
In this contribution tracking control designs using output feedback are presented for a two-phase Stefan problem arising in the modeling of the Vertical Gradient Freeze process. The two-phase Stefan problem, consisting of two coupled free boundary problems, is a vital part of many crystal growth processes due to the temporally varying extent of the solid and liquid domains during growth. After discussing the special needs of the process, collocated as well as flatness-based state feedback designs are carried out. To render the setup complete, an observer design is performed, using a flatness-based approximation of the original distributed parameter system. The quality of the provided approximations as well as the performance of the open and closed loop control setups is analysed in several simulations.
机构、总结、中文摘要均由AI分析而来，可能存在错误，请以论文正文为准。
