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arXiv 1908.02418cond-mat.mes-hallphysics.app-ph
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Multimode internal resonances in a MEMS self-sustained oscillator

S. Houri, D. Hatanaka, M. Asano, H. Yamaguchi

英文摘要:

We investigate the dynamics of a microelectromechanical (MEMS) self-sustained oscillator supporting multiple resonating and interacting modes. In particular, the interaction of the first four flexural modes along with the first torsional mode are studied, whereby 1:2, 1:3, and 2:1 internal resonances occur. Even and odd modes are induced to couple by breaking the longitudinal symmetry of the structure. Self-oscillations are induced in the second flexural mode via a gain-feedback loop, thereafter its frequency is pulled into a commensurate frequency ratio with the other modes, enabling the oscillator to act as a driver/pump for four modes simultaneously. Thus, by leveraging multiple internal resonances, a five modes frequency-locked comb is generated.

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