4.5 GHz铌酸锂MEMS滤波器，用于5G前端，具有10%的部分带宽
4.5 GHz Lithium Niobate MEMS Filters with 10% Fractional Bandwidth for 5G Front-ends
摘要：
本文提出了一种用于5G前端的新型微机电系统（MEMS）C波段滤波器。该滤波器由基于薄膜锂酸盐中的一阶非对称兰姆波（A1）模式的谐振器组成。两个滤波器已被证明在4.5 GHz的急剧滚降，平坦的带内群延迟，并在宽频率范围内的无杂散响应。第一种设计的分数带宽（FBW）为10%，插入损耗（IL）为1.7 dB，带外（OoB）抑制为-13 dB，占用面积为0.36 mm 2，而第二种设计的FBW为8.5%，IL为2.7 dB，OoB抑制为-25 dB，占用面积为0.9 mm^2。本文的演示标志着5G频率下纯声学滤波器实现的最大分数带宽（FBW）。
英文摘要：
This paper presents a new class of micro-electro-mechanical system (MEMS) C-band filters for 5G front-ends. The filter is comprised of resonators based on the first-order asymmetric Lamb wave (A1) mode in thin film lithium niobate. Two filters have been demonstrated at 4.5 GHz with sharp roll-off, flat in-band group delay, and spurious-free response over a wide frequency range. The first design shows a fractional bandwidth (FBW) of 10%, an insertion loss (IL) of 1.7 dB, an out-of-band (OoB) rejection of -13 dB, and a compact footprint of 0.36 mm2, while the second design shows an FBW of 8.5%, an IL of 2.7 dB, an OoB rejection of -25 dB, and a footprint of 0.9 mm^2. The demonstrations herein mark the largest fractional bandwidth (FBW) achieved for acoustic-only filters at 5G frequencies.
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