集成在硅基光子平台上的蓝光微激光器
Blue Microlasers Integrated on a Photonic Platform on Silicon
摘要：
III族氮化物纳米光子电路的主要兴趣是有源结构和激光源的集成。展示了集成在硅上并在蓝色光谱范围内发射的III族氮化物微盘激光器的光子平台。主动微盘侧耦合到悬浮总线波导，和耦合的发射被引导和外耦合到自由空间使用光栅耦合器。在蓝色光谱范围内，光盘和波导之间需要小于100 nm的小间隙尺寸，以实现最佳的倏逝波耦合。为了避免波导中微盘发射的再吸收，量子阱从波导蚀刻掉。在连续波激励下，观察到大于2000的加载品质因数的回音壁模式的小间隙和大波导弯曲角的设备。在脉冲激发条件下，激光被证明为3 $μ$ m直径的微盘集成在一个完整的光子电路。因此，我们提出了第一个示范的III族氮化物微激光器耦合到纳米光子电路。
英文摘要：
The main interest of group-III-nitride nanophotonic circuits is the integration of active structures and laser sources. A photonic platform of group-III-nitride microdisk lasers integrated on silicon and emitting in the blue spectral range is demonstrated. The active microdisks are side-coupled to suspended bus waveguides, and the coupled emission is guided and outcoupled to free space using grating couplers. A small gap size of less than 100 nm between the disk and the waveguide is required in the blue spectral range for optimal evanescent coupling. To avoid reabsorption of the microdisk emission in the waveguide, the quantum wells are etched away from the waveguide. Under continuous-wave excitation, loaded quality factors greater than 2000 are observed for the whispering gallery modes for devices with small gaps and large waveguide bending angles. Under pulsed excitation conditions, lasing is evidenced for 3 $μ$m diameter microdisks integrated in a full photonic circuit. We thus present a first demonstration of a III-nitride microlaser coupled to a nanophotonic circuit.
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