纳米机械屈曲的全静电控制
Full Electrostatic Control of Nanomechanical Buckling
摘要：
在微米和纳米尺度下的屈曲产生远距离的非线性状态，这对于传感、形状重构和机械计算应用是有益的。虽然已经开发了不同的方法来访问在小尺度上的屈曲，如使用加热或预应力梁，很少有人注意到迄今为止，动态和精确地控制所有的临界分叉参数，压缩应力和梁上的侧向力。精确和按需产生的压缩应力的可单独寻址的微结构是形态可重构器件特别关键。在这里，我们开发了一种全静电架构来控制压缩力以及屈曲的方向和数量，而不会在微/纳米结构上产生大量热量。通过这种架构，我们展示了设备功能和动态的基本方面。通过在任何数字电子标准上施加电压，我们已经控制了屈曲的方向。横向挠度达到梁长的12%。通过调节作用在梁上的压应力和横向静电力，我们调节了分叉后稳定态之间的势能势垒，并表征了这些状态之间的突变.所提出的架构为进一步的研究开辟了道路，可以实现高效的致动器和多路复用的形状变换设备。
英文摘要：
Buckling at the micro and nanoscale generates distant bistable states which can be beneficial for sensing, shape-reconfiguration and mechanical computation applications. Although different approaches have been developed to access buckling at small scales, such as the use heating or pre-stressing beams, very little attention has been paid so far to dynamically and precisely control all the critical bifurcation parameters, the compressive stress and the lateral force on the beam. Precise and on-demand generation of compressive stress on individually addressable microstructures is especially critical for morphologically reconfigurable devices. Here, we develop an all-electrostatic architecture to control the compressive force, as well as the direction and amount of buckling, without significant heat generation on micro/nano structures. With this architecture, we demonstrated fundamental aspects of device function and dynamics. By applying voltages at any of the digital electronics standards, we have controlled the direction of buckling. Lateral deflections as large as 12% of the beam length were achieved. By modulating the compressive stress and lateral electrostatic force acting on the beam, we tuned the potential energy barrier between the post-bifurcation stable states and characterized snap-through transitions between these states. The proposed architecture opens avenues for further studies that can enable efficient actuators and multiplexed shape-shifting devices.
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